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- Granville-Phillips® Indirect Vacuum Gauges
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- Vacuum Pressure Transducers
Vacuum Pressure Transducers
MKS modular vacuum transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important. They are available as pressure transducers with an analog output, or as vacuum modules with digital communications used to transmit the pressure signal.
Vacuum Pressure Transducers
Showing 336
products in 15
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Showing 336
products in 15
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901P MicroPirani™ - Piezo Loadlock Vacuum Transducers
- Absolute pressure measurement from 1,000 to 10-5 Torr
- 3-sensor functionality in a single transducer for a wide measurement range
- Analog, RS232, RS485, & EtherCAT® versions
| Compare | Description | Avail. | Price | Qty. | |||
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901PLoadlock Vacuum Transducer, MicroPirani-Piezo, 0.00001-1000 Torr |
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901PLoadlock Vacuum Transducer, MicroPirani-Piezo, 0.00001-1000 Torr
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901P-11030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS232 | $685 |
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901P-11030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS232
$685
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901P-11034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS232 | $855 |
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901P-11034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS232
$855
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901P-12034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS485 | $855 |
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901P-12034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS485
$855
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901P-12030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS485 | $685 |
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901P-12030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS485
$685
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Viewing 5 of 25 Products
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925 Micro Pirani™ Vacuum Transducers
- Absolute measurement range from 10-5 Torr to Atmosphere
- MicroPirani sensor is resistant to damage from air inrush or vibration
- Analog, RS232, RS485, & EtherCAT® versions
| Compare | Description | Avail. | Price | Qty. | |||
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925Vacuum Transducer, Micro Pirani™, 1.0x10-5 to 760 Torr |
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925Vacuum Transducer, Micro Pirani™, 1.0x10-5 to 760 Torr
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925-11010Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB9, 1 Relay | $514 |
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925-11010Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB9, 1 Relay
$514
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925-11014Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB9, 1 Relay | $683 |
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925-11014Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB9, 1 Relay
$683
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925-11020Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15 | $493 |
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925-11020Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS232, DB15
$493
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925-11024Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15 | $661 |
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925-11024Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15
$661
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Viewing 5 of 45 Products
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910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers
- Absolute pressure measurement from 1500 to 10-5 Torr
- Two sensors in a single transducer for wide measurement range
- Gas independent absolute pressure measurement from 11 to 1500 Torr
| Compare | Description | Avail. | Price | Qty. | |||
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910Vacuum Transducer, MicroPirani - Absolute Piezo, Series 910 |
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910Vacuum Transducer, MicroPirani - Absolute Piezo, Series 910
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910-11030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS232 | $662 |
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910-11030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS232
$662
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910-11034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS232 | $829 |
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910-11034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS232
$829
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910-12030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS485 | $662 |
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910-12030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS485
$662
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910-12034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS485 | $829 |
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910-12034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS485
$829
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Viewing 5 of 25 Products
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275 Mini-Convectron® Vacuum Transducers
- Absolute pressure measurement from atmosphere to 10-4 Torr
- Compact and rugged all-metal package is virtually immune to RF interference
- All functions programmable through RS485 or DeviceNet interfaces
| Compare | Description | Avail. | Price | Qty. | |||
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275Mini-Convectron® Gauge, 10-4 Torr to Atmosphere, Series 275 |
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275Mini-Convectron® Gauge, 10-4 Torr to Atmosphere, Series 275
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275330-GDPressure Gauge, Mini-Convectron, NW16 ISO-KF, Analog, Tungsten | $450 |
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275330-GDPressure Gauge, Mini-Convectron, NW16 ISO-KF, Analog, Tungsten
$450
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275330-GEPressure Gauge, Mini-Convectron, NW25 ISO-KF, Analog, Tungsten | $460 |
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275330-GEPressure Gauge, Mini-Convectron, NW25 ISO-KF, Analog, Tungsten
$460
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275330-GFPressure Gauge, Mini-Convectron, 1.33 in. CF, Analog, Tungsten | $460 |
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275330-GFPressure Gauge, Mini-Convectron, 1.33 in. CF, Analog, Tungsten
$460
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275330-GGPressure Gauge, Mini-Convectron, 2.75 in. CF, Analog, Tungsten | $475 |
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275330-GGPressure Gauge, Mini-Convectron, 2.75 in. CF, Analog, Tungsten
$475
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Viewing 5 of 40 Products
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902B Absolute Piezo Vacuum Transducers
- Low cost transducer with 0.1 to 1000 Torr measurement range
- Solid state Piezo sensor resistant to damage from air inrush and vibrations
- robust design and stainless steel construction for harsh processes
| Compare | Description | Avail. | Price | Qty. | |||
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902BAbsolute Vacuum Transducer, 0.1-1000 Torr, MEMS-based Piezo Sensor |
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902BAbsolute Vacuum Transducer, 0.1-1000 Torr, MEMS-based Piezo Sensor
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902B-11010Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40 | $415 |
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902B-11010Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40
$415
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902B-11012Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP54 | $555 |
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902B-11012Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP54
$555
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902B-11014Piezo Vacuum Transducer, Display, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40 | $590 |
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902B-11014Piezo Vacuum Transducer, Display, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40
$590
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902B-11020Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, IP40 | $390 |
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902B-11020Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, IP40
$390
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Viewing 5 of 57 Products
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523 Wide Range Cold Cathode Vacuum Transducers
- Single transducer covers 10-7 Torr to Atmosphere
- Unique high pressure discharge cell replaces need for a second sensor
- Mountable in any orientation for ease of use and flexibility of design
500 Cold Cathode Vacuum Transducers
- Absolute measurement range from 10-10 to 10-2 Torr
- Individually calibrated gauges provide 10% accuracy
- Analog output and RS-485 communications
| Compare | Description | Avail. | Price | Qty. | |||
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5002Replacement Sensor, Cold Cathode Gauge, 500 Series |
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5002Replacement Sensor, Cold Cathode Gauge, 500 Series
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5001Vacuum Gauge, Cold Cathode, 1x10-10 - 0.01 Torr |
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5001Vacuum Gauge, Cold Cathode, 1x10-10 - 0.01 Torr
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500100-2C-R4E-MVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, mbar Units | $1,258 |
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500100-2C-R4E-MVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, mbar Units
$1,258
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500100-2C-R4E-PVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Pascal Units | $1,258 |
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500100-2C-R4E-PVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Pascal Units
$1,258
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500100-2C-R4E-TVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Torr Units | $1,258 |
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500100-2C-R4E-TVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Torr Units
$1,258
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Viewing 5 of 38 Products
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971B UniMag™ Cold Cathode Vacuum Transducers
- Absolute measurement range from 1x10-8 to 0.005 Torr
- The cold cathode anode module design is user serviceable to decrease downtime
- Ease of operation via analog output, RS232, or RS485
| Compare | Description | Avail. | Price | Qty. | |||
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971BCold Cathode Vacuum Transducer, UniMag, Series 971B |
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971BCold Cathode Vacuum Transducer, UniMag, Series 971B
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971B-21024Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232 | $906 |
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971B-21024Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232
$906
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971B-21030Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays | $738 |
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971B-21030Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays
$738
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971B-21034Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays | $949 |
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971B-21034Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays
$949
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971B-22020Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485 | $738 |
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971B-22020Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485
$738
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Viewing 5 of 24 Products
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972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module design is user serviceable to decrease downtime
- RS232, RS485 or EtherCAT®/Analog communications
| Compare | Description | Avail. | Price | Qty. | |||
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972BCold Cathode Vacuum Transducer, DualMag, Series 972B |
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972BCold Cathode Vacuum Transducer, DualMag, Series 972B
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972B-21020Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232 | $1,045 |
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972B-21020Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232
$1,045
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972B-21024Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232 | $1,213 |
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972B-21024Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232
$1,213
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972B-21030Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232, 3 Relays | $1,088 |
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972B-21030Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232, 3 Relays
$1,088
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972B-21034Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays | $1,256 |
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972B-21034Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays
$1,256
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Viewing 5 of 25 Products
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974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module is user serviceable to decrease downtime
- MEMS based MicroPirani sensor allows low auto cold cathode turn-on pressure
| Compare | Description | Avail. | Price | Qty. | |||
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974BVacuum Transducer, Cold Cathode, MicroPirani, Piezo, 1x10-8 - 1500 Torr |
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974BVacuum Transducer, Cold Cathode, MicroPirani, Piezo, 1x10-8 - 1500 Torr
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974B-21020Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232 | $1,339 |
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974B-21020Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232
$1,339
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974B-21024Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232 | $1,507 |
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974B-21024Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232
$1,507
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974B-21030Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays |
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$1,383 |
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974B-21030Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays
$1,383
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974B-21034Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays |
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$1,551 |
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974B-21034Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays
$1,551
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Viewing 5 of 25 Products
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355 Micro-Ion® Hot Cathode Vacuum Transducers
- Vacuum pressure measurement to 10-9 Torr
- Dual filaments increase equipment uptime
- Optional local display aids in setup and diagnostics
| Compare | Description | Avail. | Price | Qty. | |||
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355Hot Cathode Vacuum Transducer, Series 355 |
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355Hot Cathode Vacuum Transducer, Series 355
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355400-0-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, Analog | $967 |
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355400-0-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, Analog
$967
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355410-1-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, RS485, 1 Relay | $1,167 |
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355410-1-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, RS485, 1 Relay
$1,167
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355600-0-YE-THot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, Analog | $1,180 |
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355600-0-YE-THot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, Analog
$1,180
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355420-2-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays | $1,287 |
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355420-2-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays
$1,287
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Viewing 5 of 7 Products
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390 Micro-Ion® ATM Vacuum Transducers
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Precision differential pressure measurement at atmosphere
- Dual ionization gauge filaments increase equipment uptime
| Compare | Description | Avail. | Price | Qty. | |||
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390Vacuum Transducer, Micro-Ion, Conductron, Piezo, Series 390 |
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390Vacuum Transducer, Micro-Ion, Conductron, Piezo, Series 390
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390410-0-YE-TVacuum Gauge, Micro-Ion ATM, NW25 ISO-KF, Analog | $1,300 |
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390410-0-YE-TVacuum Gauge, Micro-Ion ATM, NW25 ISO-KF, Analog
$1,300
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390411-0-YE-TVacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog | $1,525 |
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390411-0-YE-TVacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog
$1,525
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390510-0-YG-TVacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485 | $1,500 |
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390510-0-YG-TVacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485
$1,500
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390510-0-YH-TVacuum Gauge, Micro-Ion ATM, 0.5 in. VCR, RS485 | $1,500 |
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390510-0-YH-TVacuum Gauge, Micro-Ion ATM, 0.5 in. VCR, RS485
$1,500
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Viewing 5 of 10 Products
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392 Micro-Ion® Plus Vacuum Transducers
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Dual ionization gauge filaments that increase equipment uptime
- RS-485 and DeviceNet have optional setpoint relays for process control
| Compare | Description | Avail. | Price | Qty. | |||
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392Vacuum Gauge, Micro-Ion® Plus, Series 392 |
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392Vacuum Gauge, Micro-Ion® Plus, Series 392
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392401-0-YE-TVacuum Gauge, Micro-Ion Plus, NW25 ISO-KF, Analog | $1,175 |
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392401-0-YE-TVacuum Gauge, Micro-Ion Plus, NW25 ISO-KF, Analog
$1,175
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392501-0-YH-TVacuum Gauge, Micro-Ion Plus, 0.5 in. VCR, RS485 | $1,375 |
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392501-0-YH-TVacuum Gauge, Micro-Ion Plus, 0.5 in. VCR, RS485
$1,375
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392402-0-YE-TVacuum Gauge, Micro-Ion Plus, Display, NW25 ISO-KF, Analog | $1,375 |
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392402-0-YE-TVacuum Gauge, Micro-Ion Plus, Display, NW25 ISO-KF, Analog
$1,375
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392501-0-YG-TVacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, RS485 | $1,375 |
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392501-0-YG-TVacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, RS485
$1,375
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Viewing 5 of 8 Products
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347 Stabil-Ion® Vacuum Transducers
- Absolute measurement from 10-10 to 0.02 Torr
- Superior Stabil-Ion® Gauge performance in a compact package
- Dual gauge filaments that increase equipment uptime
| Compare | Description | Avail. | Price | Qty. | |||
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347054-YE-TVacuum Transducer, Stabil-Ion Ionization, 2x10-10 Torr, 2.75 in. CF | $1,770 |
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347054-YE-TVacuum Transducer, Stabil-Ion Ionization, 2x10-10 Torr, 2.75 in. CF
$1,770
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347054-YU-TVacuum Transducer, Stabil-Ion Ionization, 1x10-10 Torr, 2.75 in. CF | $1,770 |
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347054-YU-TVacuum Transducer, Stabil-Ion Ionization, 1x10-10 Torr, 2.75 in. CF
$1,770
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Viewing 2 of 2 Products
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905 MicroPirani™ Vacuum Transducer Kit
- Wide measurement range from atmosphere to 10-5 Torr
- Three open collector set points for advanced process control
- User-friendly digital control via host processor or computer
| Compare | Description | Avail. | Price | Qty. | |||
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905-0001Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF | $1,075 |
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905-0001Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF
$1,075
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905-0002Power Supply, Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF | $1,100 |
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905-0002Power Supply, Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF
$1,100
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905-0003Electronics Module, MicroPirani™ Vacuum Sensor Kit, Nude Sensor | $590 |
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905-0003Electronics Module, MicroPirani™ Vacuum Sensor Kit, Nude Sensor
$590
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905-0004Electronics Module, MicroPirani™ Vacuum Sensor Kit, PCB Sensor | $590 |
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905-0004Electronics Module, MicroPirani™ Vacuum Sensor Kit, PCB Sensor
$590
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Viewing 4 of 4 Products
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Ultra-High Velocity