- Products
- Granville-Phillips® Indirect Vacuum Gauges
- Vacuum Pressure Transducers
- Vacuum Pressure Transducers
Vacuum Pressure Transducers
MKS modular vacuum transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important. They are available as pressure transducers with an analog output, or as vacuum modules with digital communications used to transmit the pressure signal.
Vacuum Pressure Transducers
MKS modular vacuum transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important. They are available as pressure transducers with an analog output, or as vacuum modules with digital communications used to transmit the pressure signal.
Showing 333
products in 13
families
Show Filters:
Showing 333
products in 13
families
View:
901P MicroPirani™ - Piezo Loadlock Vacuum Transducers
- Absolute pressure measurement from 1,000 to 10-5 Torr
- 3-sensor functionality in a single transducer for a wide measurement range
- Analog, RS232, RS485, & EtherCAT® versions
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
901PLoadlock Vacuum Transducer, MicroPirani-Piezo, 0.00001-1000 Torr |
|
901PLoadlock Vacuum Transducer, MicroPirani-Piezo, 0.00001-1000 Torr
|
||||
 |
901P-11030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS232 | $685 |
|
901P-11030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS232
$685
|
|||
| |
901P-11034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS232 | $855 |
|
901P-11034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS232
$855
|
|||
| |
901P-12034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS485 | $855 |
|
901P-12034Loadlock Vacuum Transducer, MicroPirani-Piezo, Display, NW16 ISO-KF, RS485
$855
|
|||
| |
901P-12030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS485 | $685 |
|
901P-12030Loadlock Vacuum Transducer, MicroPirani-Piezo, NW16 ISO-KF, RS485
$685
|
Viewing5 of 25 Products
| View All 25 Products
925 Micro Pirani™ Vacuum Transducers
- Absolute measurement range from 10-5 Torr to Atmosphere
- MicroPirani sensor is resistant to damage from air inrush or vibration
- Analog, RS232, RS485, & EtherCAT® versions
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
925Vacuum Transducer, Micro Pirani™, 1.0x10-5 to 760 Torr |
|
925Vacuum Transducer, Micro Pirani™, 1.0x10-5 to 760 Torr
|
||||
 |
925-11034Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15, 3 Relays |
|
$704 |
|
925-11034Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS232, DB15, 3 Relays
$704
|
||
| |
925-12020Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS485, DB15 | $493 |
|
925-12020Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS485, DB15
$493
|
|||
| |
925-12024Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS485, DB15 | $634 |
|
925-12024Vacuum Pressure Transducer, MicroPirani, Display, NW16 ISO-KF, RS485, DB15
$634
|
|||
| |
925-12030Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS485, DB15, 3 Relays | $536 |
|
925-12030Vacuum Pressure Transducer, MicroPirani, NW16 ISO-KF, RS485, DB15, 3 Relays
$536
|
Viewing5 of 45 Products
| View All 45 Products
910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers
- Absolute pressure measurement from 1500 to 10-5 Torr
- Two sensors in a single transducer for wide measurement range
- Gas independent absolute pressure measurement from 11 to 1500 Torr
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
| |
910Vacuum Transducer, MicroPirani - Absolute Piezo, Series 910 |
|
910Vacuum Transducer, MicroPirani - Absolute Piezo, Series 910
|
||||
| |
910-11030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS232 | $662 |
|
910-11030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS232
$662
|
|||
| |
910-11034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS232 | $829 |
|
910-11034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS232
$829
|
|||
| |
910-12030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS485 | $662 |
|
910-12030Vacuum Transducer, MicroPirani-Absolute Piezo, NW16 ISO-KF, RS485
$662
|
|||
| |
910-12034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS485 | $829 |
|
910-12034Vacuum Transducer, MicroPirani-Absolute Piezo, Display, NW16 ISO-KF, RS485
$829
|
Viewing5 of 25 Products
| View All 25 Products
275 Mini-Convectron® Vacuum Transducers
- Absolute pressure measurement from atmosphere to 10-4 Torr
- Compact and rugged all-metal package is virtually immune to RF interference
- All functions programmable through RS485 or DeviceNet interfaces
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
275Mini-Convectron® Gauge, 10-4 Torr to Atmosphere, Series 275 |
|
275Mini-Convectron® Gauge, 10-4 Torr to Atmosphere, Series 275
|
||||
 |
275330-GPPressure Gauge, Mini-Convectron, 0.125 in. NPT, Analog, Tungsten | $430 |
|
275330-GPPressure Gauge, Mini-Convectron, 0.125 in. NPT, Analog, Tungsten
$430
|
|||
| |
275330-GQPressure Gauge, Mini-Convectron, 4 VCR Female, Analog, Tungsten | $455 |
|
275330-GQPressure Gauge, Mini-Convectron, 4 VCR Female, Analog, Tungsten
$455
|
|||
| |
275330-GRPressure Gauge, Mini-Convectron, 8 VCR female, Analog, Tungsten | $475 |
|
275330-GRPressure Gauge, Mini-Convectron, 8 VCR female, Analog, Tungsten
$475
|
|||
 |
275400-1-GE-TPressure Gauge, Mini-Convectron, NW25 ISO-KF, Non-linear Analog, 1 Relay, Tungsten | $357 |
|
275400-1-GE-TPressure Gauge, Mini-Convectron, NW25 ISO-KF, Non-linear Analog, 1 Relay, Tungsten
$357
|
Viewing5 of 40 Products
| View All 40 Products
902B Absolute Piezo Vacuum Transducers
- Low cost transducer with 0.1 to 1000 Torr measurement range
- Solid state Piezo sensor resistant to damage from air inrush and vibrations
- robust design and stainless steel construction for harsh processes
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
902BAbsolute Vacuum Transducer, 0.1-1000 Torr, MEMS-based Piezo Sensor |
|
902BAbsolute Vacuum Transducer, 0.1-1000 Torr, MEMS-based Piezo Sensor
|
||||
| |
902B-11010Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40 | $415 |
|
902B-11010Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40
$415
|
|||
| |
902B-11012Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP54 | $555 |
|
902B-11012Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP54
$555
|
|||
| |
902B-11014Piezo Vacuum Transducer, Display, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40 | $590 |
|
902B-11014Piezo Vacuum Transducer, Display, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB9, 1 Relay, IP40
$590
|
|||
| |
902B-11020Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, IP40 | $390 |
|
902B-11020Piezo Vacuum Transducer, 0.1-1000 Torr, NW16 ISO-KF, RS232, 0-10 VDC, DB15, IP40
$390
|
Viewing5 of 57 Products
| View All 57 Products
500 Cold Cathode Vacuum Transducers
- Absolute measurement range from 10-10 to 10-2 Torr
- Individually calibrated gauges provide 10% accuracy
- Analog output and RS-485 communications
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
5002Replacement Sensor, Cold Cathode Gauge, 500 Series |
|
5002Replacement Sensor, Cold Cathode Gauge, 500 Series
|
||||
 |
5001Vacuum Gauge, Cold Cathode, 1x10-10 - 0.01 Torr |
|
5001Vacuum Gauge, Cold Cathode, 1x10-10 - 0.01 Torr
|
||||
| |
500100-2C-R4E-MVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, mbar Units | $1,258 |
|
500100-2C-R4E-MVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, mbar Units
$1,258
|
|||
| |
500100-2C-R4E-PVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Pascal Units | $1,258 |
|
500100-2C-R4E-PVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Pascal Units
$1,258
|
|||
| |
500100-2C-R4E-TVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Torr Units | $1,258 |
|
500100-2C-R4E-TVacuum Gauge, Cold Cathode, Calibrated, NW25 ISO-KF, Torr Units
$1,258
|
Viewing5 of 38 Products
| View All 38 Products
971B UniMag™ Cold Cathode Vacuum Transducers
- Absolute measurement range from 1x10-8 to 0.005 Torr
- The cold cathode anode module design is user serviceable to decrease downtime
- Ease of operation via analog output, RS232, or RS485
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
971BCold Cathode Vacuum Transducer, UniMag, Series 971B |
|
971BCold Cathode Vacuum Transducer, UniMag, Series 971B
|
||||
 |
971B-21024Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232 | $906 |
|
971B-21024Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232
$906
|
|||
| |
971B-21030Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays | $738 |
|
971B-21030Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS232, 3 Relays
$738
|
|||
| |
971B-21034Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays | $949 |
|
971B-21034Vacuum Pressure Transducer, Cold Cathode, Display, NW25 ISO-KF, RS232, 3 Relays
$949
|
|||
| |
971B-22020Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485 | $738 |
|
971B-22020Vacuum Pressure Transducer, Cold Cathode, NW25 ISO-KF, RS485
$738
|
Viewing5 of 24 Products
| View All 24 Products
972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module design is user serviceable to decrease downtime
- RS232, RS485 or EtherCAT®/Analog communications
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
| |
972BCold Cathode Vacuum Transducer, DualMag, Series 972B |
|
972BCold Cathode Vacuum Transducer, DualMag, Series 972B
|
||||
| |
972B-21020Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232 | $1,045 |
|
972B-21020Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232
$1,045
|
|||
| |
972B-21024Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232 | $1,213 |
|
972B-21024Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232
$1,213
|
|||
| |
972B-21030Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232, 3 Relays | $1,088 |
|
972B-21030Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232, 3 Relays
$1,088
|
|||
| |
972B-21034Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays | $1,256 |
|
972B-21034Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays
$1,256
|
Viewing5 of 25 Products
| View All 25 Products
974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module is user serviceable to decrease downtime
- MEMS based MicroPirani sensor allows low auto cold cathode turn-on pressure
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
| |
974BVacuum Transducer, Cold Cathode, MicroPirani, Piezo, 1x10-8 - 1500 Torr |
|
974BVacuum Transducer, Cold Cathode, MicroPirani, Piezo, 1x10-8 - 1500 Torr
|
||||
| |
974B-21020Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232 | $1,339 |
|
974B-21020Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232
$1,339
|
|||
| |
974B-21024Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232 | $1,507 |
|
974B-21024Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232
$1,507
|
|||
 |
974B-21030Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays |
|
$1,383 |
|
974B-21030Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays
$1,383
|
||
 |
974B-21034Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays |
|
$1,551 |
|
974B-21034Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays
$1,551
|
Viewing5 of 25 Products
| View All 25 Products
355 Micro-Ion® Hot Cathode Vacuum Transducers
- Vacuum pressure measurement to 10-9 Torr
- Dual filaments increase equipment uptime
- Optional local display aids in setup and diagnostics
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
355Hot Cathode Vacuum Transducer, Series 355 |
|
355Hot Cathode Vacuum Transducer, Series 355
|
||||
| |
355400-0-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, Analog | $967 |
|
355400-0-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, Analog
$967
|
|||
| |
355410-1-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, RS485, 1 Relay | $1,167 |
|
355410-1-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, RS485, 1 Relay
$1,167
|
|||
| |
355600-0-YE-THot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, Analog | $1,180 |
|
355600-0-YE-THot Cathode Vacuum Transducer, Display, Yttria, NW25 ISO-KF, Analog
$1,180
|
|||
 |
355420-2-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays | $1,287 |
|
355420-2-YE-THot Cathode Vacuum Transducer, Yttria, NW25 ISO-KF, DeviceNet, 2 Relays
$1,287
|
Viewing5 of 7 Products
| View All 7 Products
390 Micro-Ion® ATM Vacuum Transducers
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Precision differential pressure measurement at atmosphere
- Dual ionization gauge filaments increase equipment uptime
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
390Vacuum Transducer, Micro-Ion, Conductron, Piezo, Series 390 |
|
390Vacuum Transducer, Micro-Ion, Conductron, Piezo, Series 390
|
||||
| |
390410-0-YE-TVacuum Gauge, Micro-Ion ATM, NW25 ISO-KF, Analog | $1,300 |
|
390410-0-YE-TVacuum Gauge, Micro-Ion ATM, NW25 ISO-KF, Analog
$1,300
|
|||
| |
390411-0-YE-TVacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog | $1,525 |
|
390411-0-YE-TVacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog
$1,525
|
|||
| |
390510-0-YG-TVacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485 | $1,500 |
|
390510-0-YG-TVacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485
$1,500
|
|||
| |
390510-0-YH-TVacuum Gauge, Micro-Ion ATM, 0.5 in. VCR, RS485 | $1,500 |
|
390510-0-YH-TVacuum Gauge, Micro-Ion ATM, 0.5 in. VCR, RS485
$1,500
|
Viewing5 of 10 Products
| View All 10 Products
392 Micro-Ion® Plus Vacuum Transducers
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Dual ionization gauge filaments that increase equipment uptime
- RS-485 and DeviceNet have optional setpoint relays for process control
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
392Vacuum Gauge, Micro-Ion® Plus, Series 392 |
|
392Vacuum Gauge, Micro-Ion® Plus, Series 392
|
||||
| |
392401-0-YE-TVacuum Gauge, Micro-Ion Plus, NW25 ISO-KF, Analog | $1,175 |
|
392401-0-YE-TVacuum Gauge, Micro-Ion Plus, NW25 ISO-KF, Analog
$1,175
|
|||
| |
392501-0-YH-TVacuum Gauge, Micro-Ion Plus, 0.5 in. VCR, RS485 | $1,375 |
|
392501-0-YH-TVacuum Gauge, Micro-Ion Plus, 0.5 in. VCR, RS485
$1,375
|
|||
| |
392402-0-YE-TVacuum Gauge, Micro-Ion Plus, Display, NW25 ISO-KF, Analog | $1,375 |
|
392402-0-YE-TVacuum Gauge, Micro-Ion Plus, Display, NW25 ISO-KF, Analog
$1,375
|
|||
| |
392501-0-YG-TVacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, RS485 | $1,375 |
|
392501-0-YG-TVacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, RS485
$1,375
|
Viewing5 of 8 Products
| View All 8 Products
905 MicroPirani™ Vacuum Transducer Kit
- Wide measurement range from atmosphere to 10-5 Torr
- Three open collector set points for advanced process control
- User-friendly digital control via host processor or computer
| Compare | Description | Avail. | Price | Qty. | |||
|---|---|---|---|---|---|---|---|
 |
905-0001Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF | $1,075 |
|
905-0001Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF
$1,075
|
|||
| |
905-0002Power Supply, Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF | $1,100 |
|
905-0002Power Supply, Evaluation Board, MicroPirani™ Vacuum Sensor Kit, NW16 ISO-KF
$1,100
|
|||
 |
905-0003Electronics Module, MicroPirani™ Vacuum Sensor Kit, Nude Sensor | $590 |
|
905-0003Electronics Module, MicroPirani™ Vacuum Sensor Kit, Nude Sensor
$590
|
|||
| |
905-0004Electronics Module, MicroPirani™ Vacuum Sensor Kit, PCB Sensor | $590 |
|
905-0004Electronics Module, MicroPirani™ Vacuum Sensor Kit, PCB Sensor
$590
|
Viewing4 of 4 Products
| View All 4 Products
Ultra-High Velocity