• Absolute Measurement Range
    1.0 x 10-5 to 1500 Torr
  • Differential Measurement Range
    -760 to +760 Torr
  • Digital Communication
    RS485/RS232 (4800 to 230400 Baud)
  • Sensor
    MicroPirani™ (MEMS Thermal Conductivity)
    Piezo differential (MEMS diaphragm)
  • Relays
    3 relays SPDT (optional)
  • Set Point Range
    Absolute: 5.0 x 10-4 to 1000 Torr:Differential: -760 to +100 Torr
  • Calibration Gas
    Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
  • Operating Temperature
    0° to 40°C (32° to 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
  • Digital Status
    Absolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
  • Analog Output
    Absolute Pressure: 1 to 9 VDC, 1 VDC/decade, 100Ω maximum output impedance (16 bit)
  • Optional Analog Output 2
    Piezo Differential: 5 VDC = 0 Torr, 1 VDC/decade (12 bit)
  • Relay Contact Rating
    1 A @ 3 0VAC/DC, resistive
  • Relay Response
    100 msec maximum
  • Power Requirements
    RS232/RS485: 9 to 30 VDC, < 1.2 watts max
    EtherCAT: 9 to 30 VDC, < 2 watts max
  • MicroPirani Accuracy
    5 x 10-4 to 1 x 10-3 Torr ±10% of reading
    1 x 10-3 to 100 Torr ±5% of reading
    100 Torr to Atm ±25% of reading
  • MicroPirani Repeatability
    1 x 10-3 to 100 Torr ±2% of reading
  • Piezo Differential Accuracy
    -10 to +10 Torr ±10% of reading
    -100 to -10 Torr ±8% of reading
    -760 to -100 Torr ±1% of reading
    +10 to 100 Torr ±5% of reading
  • Piezo Differential Repeatability
    -760 to +10 Torr ±1% of reading
  • Piezo Differential Zero Stability
    ±0.1% of Full Scale (Full Scale = 760 Torr)
  • Overpressure Limit
    1500 Torr (Absolute)
  • Internal Volume
    (KF16) 2.8 cc
  • Exposed Materials
    Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    170 g (with KF 16 Flange)
  • Compliance


Absolute and Differential Pressure Measurement

The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides patented, gas independent absolute pressure measurement from 50 -1000 Torr with increased accuracy over thermal conductivity sensors.

MicroPirani™ Sensor Technology

Unlike traditional Pirani gauges, the sensor element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani™ technology, the 901P can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 901P can be mounted in any orientation without compromising accuracy.

Piezo Differential Sensor Technology

The Piezo is a differential pressure sensor, ensuring correct atmospheric pressure measurement under varying barometric pressure conditions. Piezo technology is a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from -760 to +760 Torr relative to atmospheric pressure.

Analog Pressure Output

The 901P also has an analog pressure output of 1VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. A secondary optional analog output is used to provide the differential pressure measurement.

Three Process Control Relays

The 901P has up to three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the differential piezo measurement or the combined absolute MicroPirani™ - Piezo measurement.

Compact Design

The compact design of these vacuum transducers significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.

Optional Integrated Touch-screen Display

The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.

PDR900 Power Supply & Display

The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications.

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