Compare Model Drawings, CAD & Specs Fitting Type Digital Communication Display Relays Availability Price
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, NW25 ISO-KF, Analog
$1,175
NW25 ISO-KF No No 0
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, Display, NW25 ISO-KF, Analog
$1,375
NW25 ISO-KF No Graphics LCD 0
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, RS485
$1,375
2.75 in. CF RS485 No 0
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, 0.5 in. VCR, RS485
$1,375
8 VCR male RS485 No 0
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, Display, 2.75 in. CF, RS485, 2 Relays
$1,675
2.75 in. CF RS485 Graphics LCD 2
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, DeviceNet, 2 Relays
$1,575
2.75 in. CF DeviceNet No 2
392 micro-ion plus vacuum transducer
Vacuum Gauge, Micro-Ion Plus, Display, 2.75 in. CF, DeviceNet, 3 Relays
$1,825
2.75 in. CF DeviceNet Graphics LCD 3

Product Options

Description
  392 micro-ion plus vacuum transducer 392 Vacuum Gauge, Micro-Ion® Plus, Series 392

Specifications

  • Type
    Vacuum Transducer
  • Sensor
    Micro-Ion Ionization Sensor and Pirani Conductron Sensor
  • Absolute Measurement Range
    1 x 10-9 Torr to atmosphere
    1.33 x 10-9 mbar to atmosphere
    1.33 x 10-7 Pascal to atmosphere
    (air or N2)
  • Operating Temperature
    10° to 40°C (50° to 104°F)
  • Maximum Bakeout Temperature
    05°C (221°F) maximum, with electronics removed
  • Storage Temperature
    -40° to +70°C (-40° to +158°F)
  • Analog Output
    Logarithmic, 0.5 to 7.0 VDC, 0.5 V/decade
  • Internal Volume
    10.8 cc
  • Exposed Materials
    304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
  • Electronic Casing and Flange
    Aluminum Extrusion with Powder-coat
  • Compliance
    RoHS, CE
  • Filament
    Tungsten or yttria-coated iridium
  • X-ray Limit
    3 x 10-10 Torr
    4 x 10-10 mbar
    4 x 10-8 Pascal
  • Emission Current
    Autoranging
  • Degas
    Electron bombardment; 3 Watts for 1 minute/filament

Features

Analog Output and Digital Interface

The full range pressure measurement is output as a single analog signal or is available through optional serial RS-485 or DeviceNet™ digital interfaces. Up to three optional set point relays are available, they can be configured for process control with the ability to assign the relays at any pressure across a broad vacuum spectrum. The Series 392 Micro-Ion Plus is available with or without display, and can be configured with a wide variety of flanges.

Sensor Switching Points

Micro-Ion and Pirani Conductron Sensor Technology

The Series 392 Micro-Ion Plus combines Granville-Phillips® industry-standard and application-tested Micro-Ion ionization sensor with an innovative miniature Pirani Conductron sensor in a single gauge assembly envelope that is attached to a compact electronics control module. This compact modular design reduces the number of separate gauges, vacuum interfaces, cabling and control electronics that are typically required for full range pressure measurement. The full range pressure measurement is output as a single analog signal or is available through optional serial RS-485 or DeviceNet™ digital interfaces.

Integrated Gauge Assembly Electronic Memory

This second generation Micro-Ion Plus has integrated gauge assembly electronic memory that contains factory-calibration information. The electric memory is used by the control module to provide factory-level calibration accuracy for new and replacement gauges, and track gauge-tube usage information so the MKS service team can quickly understand your application environment. The miniature Pirani Conductron delivers improved accuracy through better thermal management within the gauge envelope. Finally, the Series 392 and Series 390 Micro-Ion ATM now share a common platform for improved product quality through high-volume manufacturing.

Field-Replaceable Gauge Assembly

The vacuum gauge assembly can quickly and easily be replaced in the field using only a screwdriver after removal from the vacuum system. Integrated electronic gauge assembly calibration information ensures replacement gauge accuracy and repeatability.

15-pin Subminiature-D Male Pinouts

Need help?

Contact an Applications Specialist by sending us an email