Specifications

  • Absolute Measurement Range
    1 x 10-9 Torr to atmosphere
    1.33 x 10-9 mbar to atmosphere
    1.33 x 10-7 Pascal to atmosphere
    (air or N2)
  • Differential Measurement Range
    -750 to +250 Torr
    -999 to +188 mbar
    -99.9 to 18.8 kPascal
  • Type
    vacuum transducer
  • Sensor
    Ionization gauge
  • Display
    Graphics LCD (optional)
  • Operating Temperature
    10° to 40°C (50° to 104°F)
  • Maximum Bakeout Temperature
    105°C (221°F) maximum, with electronics removed
  • Storage Temperature
    -40° to +70°C (-40° to +158°F)
  • Analog Output
    Absolute: Logarithmic, 0.5 to 7.0 VDC, 0.5 V per decade
    Differential: Linear 1-5 VDC, -750 to +250 Torr
  • Internal Volume
    10.8 cc
  • Exposed Materials
    304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
  • Electronic Casing and Flange
    Aluminum Extrusion with Powder-coat
  • Weight
    728.5 gm (25.7 oz) - 2.75 ConFlat fitting)
  • Compliance
    CE
  • X-ray Limit
    3 x 10-10 Torr
    4 x 10-10 mbar
    4 x 10-8 Pascal
  • LED Indicator
    Module status

Features

Unique Sensor Design

Traditionally, accurate measurement across a wide vacuum range required multiple sensors, multiple vacuum system ports, associated cables and electronics. The unique Micro-Ion® ATM sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The Micro-Ion ATM module combines multiple sensors in one microprocessor-based design, reducing overall cost of ownership, while enhancing vacuum measurement performance.

Cross Section of the Micro-Ion Gauge

Analog Output and Digital Interface

The full range pressure measurement is output as a single analog signal or available through optional serial RS-485 or DeviceNet™ digital interfaces. The RS-485 interface allows for communications between the module and host controller, and for module configuration. The DeviceNet interface provides high speed access to pressure measurement and easy configuration of gauge parameters. The RS-485 and DeviceNet versions have up to three optional set point relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.

Sensor Switching Points

Compact Design

One Micro-Ion gauge, a heat-loss sensor with a barometric diaphragm sensor, an absolute pressure diaphragm, and control electronics are all housed in a compact, modular package.

Field-Replaceable Gauge Assembly

The vacuum gauge assembly can be quickly and easily replaced in the field using only a screwdriver after removal from the vacuum system.

Resources

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Contact an Applications Specialist by sending us an email