390 Micro-Ion® ATM Modular Vacuum Pressure Transducers
Overview
The Granville-Phillips® 390 Micro-Ion® module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precise indication of vacuum chamber differential pressure from ambient.
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Precision differential pressure measurement at atmosphere
- Dual ionization gauge filaments increase equipment uptime
- Optional set point relays for process control
- Analog, RS-485 or DeviceNet output
- Optional graphical LCD display
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
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390410-0-YE-T Vacuum Gauge, Micro-Ion ATM, NW25 ISO-KF, Analog | $1,300 |
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390411-0-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, Analog | $1,525 |
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390510-0-YG-T Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, RS485 | $1,500 |
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390510-0-YH-T Vacuum Gauge, Micro-Ion ATM, 0.5 in. VCR, RS485 | $1,500 |
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390511-2-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, RS485, 2 Relays | $1,800 |
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390511-3-YE-T Vacuum Gauge, Micro-Ion ATM, Display, NW25 ISO-KF, RS-485, Analog |
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$1,800 |
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Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF Flange, RS-485, Analog
$1,825
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390511-3-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF Flange, RS-485, Analog |
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$1,825 |
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Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 2 Relays
$1,700
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390610-2-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 2 Relays | $1,700 |
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Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 3 Relays
$1,950
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390611-3-YG-T Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, DeviceNet, 3 Relays | $1,950 |
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Configuration Options
Please see the Series 390 datasheet for product options.
Specifications
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Absolute Measurement Range1 x 10-9 Torr to atmosphere
1.33 x 10-9 mbar to atmosphere
1.33 x 10-7 Pascal to atmosphere
(air or N2) -
Differential Measurement Range-750 to +250 Torr
-999 to +188 mbar
-99.9 to 18.8 kPascal -
Typevacuum transducer
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SensorIonization gauge
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DisplayGraphics LCD (optional)
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Operating Temperature10° to 40°C (50° to 104°F)
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Maximum Bakeout Temperature105°C (221°F) maximum, with electronics removed
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Storage Temperature-40° to +70°C (-40° to +158°F)
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Analog OutputAbsolute: Logarithmic, 0.5 to 7.0 VDC, 0.5 V per decade
Differential: Linear 1-5 VDC, -750 to +250 Torr -
Internal Volume10.8 cc
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Exposed Materials304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
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Electronic Casing and FlangeAluminum Extrusion with Powder-coat
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Weight728.5 gm (25.7 oz) - 2.75 ConFlat fitting)
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ComplianceCE
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X-ray Limit3 x 10-10 Torr
4 x 10-10 mbar
4 x 10-8 Pascal -
LED IndicatorModule status
Resources
Literature
- Vacuum Measurement Product Guide (711.5 kB, PDF)
- 390 Micro-Ion® ATM Modules (470.8 kB, PDF)
Manuals
- 390 Micro-Ion® ATM Module Instruction Manual 390412-X-XX-X (80.5 kB, PDF)
- 390 Micro-Ion® ATM Gauge Removal and Replacement Procedure (162.5 kB, PDF)
- 390 Micro-Ion® ATM Four-Sensor Combination Vacuum Gauge ModuleManual (1.1 MB, PDF)
- 390 Micro-Ion® Gauge with Filament Status Output Manual Addendum (111.5 kB, PDF)
- 390 Micro-Ion® ATM Four-Sensor Combination Vacum Gauge ModuleManual (1.3 MB, PDF)
Other
- 390 & 392 Declaration of Conformity (373.8 kB, PDF)
Device Description Files
- 390 Micro-Ion® ATM Module EDS File (26.9 kB, EDS)
Ultra-High Velocity