About MKS Instruments

Our Technology Enables The Future

MKS Instruments partners with customers in the environmental monitoring, defense & security, life sciences & research, process & industrial manufacturing, and thin film industries to develop ground-breaking solutions to their toughest technology challenges.

Our work enables our customers to be more successful, and our societies to be safer and more productive.

MKS Instruments, Inc is the worldwide leader in technology solutions for the markets we serve. We make the instruments, subsystems and process control solutions that enable our customers to measure, control, power, monitor and analyze the critical parameters of the advanced processes that they manage.

The chances are high that you own or have consumed a product that has been made possible by our technology.

Our people are world-class problem-solvers, operating at the leading edge of science, engineering and technology. We have a proud history of industry-changing innovation and we back it up with a global support infrastructure that ensures we are there for you throughout the life cycle of our solutions.

Our Innovations Have Shaped Industries

MKS Instruments has a proud history of innovations and inventions that have shaped the evolution of the key industries we serve. We hold over 2,500-plus patents, our team includes more than 500 degreed scientists and engineers, and we have a long history of "best product" awards.

Our ability to understand customers' strategic objectives and apply leading edge science, engineering and technology has led consistently to breakthroughs that have changed what is possible.


MKS at a Glance

MKS Instruments, Inc. is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, vacuum technology, lasers, photonics, optics, precision motion control, vibration control and laser-based manufacturing systems solutions. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include semiconductor, industrial technologies, life and health sciences, research and defense.

Download the latest MKS Fact Sheet

Our People Are Collaborative Problem-Solvers

When you become a customer of MKS Instruments you get a team of top-notch scientists and engineers dedicated to helping you succeed by solving your toughest technology challenges.

Invention, collaboration and service are in our DNA. We work hard to understand your strategic business objective and then partner with you to devise the technology solutions to achieve it.

Our Culture Balances Expertise and Curiosity

We value listening skills and business understanding as much as scientific and engineering accomplishments. As your partner, we bring all of this to bear on the technology challenges you face as you build towards success.

We try hard to be easy to do business with, and we value your feedback on how we can do better.

We Stand By You And Behind Our Solutions

You need a partner who sticks with you throughout the technology's life cycle, a partner who cares about your success. We back our solutions with a global support infrastructure so that we will be there when you need us.


Meet Our Leaders

Board Of Directors

  • John R. Bertucci, Chairman
  • Rajeev Batra, President, Siemens Digital Industries U.S.
  • Gregory R. Beecher, Former Vice President and Chief Financial Officer, Teradyne, Inc.
  • Gerald G. Colella, Former Chief Executive Officer, MKS Instruments
  • John T.C. Lee, President and Chief Executive Officer
  • Rick D. Hess, Former Executive Vice President, Analog Devices, Inc.
  • Jacqueline F. Moloney, Chancellor, University of Massachusetts, Lowell
  • Elizabeth A. Mora, Chief Administrative Officer, The Charles Stark Draper Laboratory
  • Michelle M. Warner, Former Senior Vice President, General Counsel and Corporate Secretary for USG Corporation

Executive Team

  • John T.C. Lee, President and Chief Executive Officer
  • Seth H. Bagshaw, Senior Vice President, Chief Financial Officer and Treasurer
  • Kathleen F. Burke, Senior Vice President, General Counsel and Secretary
  • Dave Henry, Senior Vice President, Marketing and Project Management
  • Jennifer J. Reilly, Senior Vice President, Chief Human Resources Officer
  • James A. Schreiner, Senior Vice President and Chief Operating Officer
  • Francis J. Tan, Senior Vice President, Strategic Development

MKS Fellows

  • Jim Kafka, Chief Business Unit Technology Officer, Lasers
  • Christiane Le Tiec, Chief Technology Officer, Plasma & Reactive Gas Solutions
  • Aaron Radomski, Chief Technology Officer, Power Solutions
  • Phil Sullivan, Chief Technology Officer, Pressure & Vacuum Measurement Solutions