972B DualMag™ Cold Cathode and MicroPirani™ Vacuum Pressure Transducers
Overview
The 972B DualMag™ vacuum transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and it combines cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure while offering 1-2 decades lower measuring range than a traditional pirani gauge. By lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended.
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module design is user serviceable to decrease downtime
- RS232, RS485 or EtherCAT®/Analog communications
- MEMS based MicroPirani sensor for low auto cold cathode turn-on pressure
- MicroPirani is automatically zeroed during pump down cycle for improved accuracy
- Small footprint design provides a compact transducer solution
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
972B-21020 Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232 |
|
$1,153 |
|
|||
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232
$1,338
|
972B-21024 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232 | $1,338 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232, 3 Relays
$1,201
|
972B-21030 Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232, 3 Relays | $1,201 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays
$1,385
|
972B-21034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS232, 3 Relays | $1,385 |
|
|||
|
|
972B-22020 Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS485 | $1,153 |
|
||||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS485
$1,338
|
972B-22024 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS485 | $1,338 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS485, 3 Relays
$1,201
|
972B-22030 Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS485, 3 Relays | $1,201 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS485, 3 Relays
$1,385
|
972B-22034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW25 ISO-KF, RS485, 3 Relays | $1,385 |
|
|||
|
972B-27020 Vacuum Transducer, Cold Cathode-MicroPirani, NW25-KF, EtherCAT |
15 Weeks
|
$1,330 |
|
|||
|
|
972B-71020 Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS232 | $1,243 |
|
||||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232
$1,427
|
972B-71024 Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232 | $1,427 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS232, 3 Relays
$1,292
|
972B-71030 Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS232, 3 Relays | $1,292 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232, 3 Relays
$1,475
|
972B-71034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232, 3 Relays |
|
$1,475 |
|
||
|
|
972B-72020 Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS485 | $1,243 |
|
||||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS485
$1,427
|
972B-72024 Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS485 | $1,427 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS485, 3 Relays
$1,292
|
972B-72030 Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS485, 3 Relays | $1,292 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS485, 3 Relays
$1,477
|
972B-72034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS485, 3 Relays | $1,477 |
|
|||
|
|
972B-77020 Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, EtherCAT |
15 Weeks
|
$1,420 |
|
|||
|
|
972B-91020 Vacuum Transducer, Cold Cathode-MicroPirani, NW40 ISO-KF, RS232 | $1,169 |
|
||||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS232
$1,355
|
972B-91024 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS232 | $1,355 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, NW40 ISO-KF, RS232, 3 Relays
$1,218
|
972B-91030 Vacuum Transducer, Cold Cathode-MicroPirani, NW40 ISO-KF, RS232, 3 Relays | $1,218 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS232, 3 Relays
$1,403
|
972B-91034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS232, 3 Relays | $1,403 |
|
|||
|
|
972B-92020 Vacuum Transducer, Cold Cathode-MicroPirani, NW40 ISO-KF, RS485 | $1,171 |
|
||||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS485
$1,355
|
972B-92024 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS485 | $1,355 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, NW40 ISO-KF, RS485, 3 Relays
$1,220
|
972B-92030 Vacuum Transducer, Cold Cathode-MicroPirani, NW40 ISO-KF, RS485, 3 Relays | $1,220 |
|
|||
|
|
Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS485, 3 Relays
$1,403
|
972B-92034 Vacuum Transducer, Cold Cathode-MicroPirani, Display, NW40 ISO-KF, RS485, 3 Relays | $1,403 |
|
|||
|
|
972B-97020 Vacuum Transducer, Cold Cathode-MicroPirani, NW40-KF, EtherCAT |
15 Weeks
|
$1,348 |
|
Configuration Options
The following options are available for 972B DualMag™ Vacuum Pressure Transducers
Ordering Code Example: 972B-21034
|
Configuration Option |
Option Code |
|---|---|
| 972B DualMag Vacuum Pressure Transducer | 972B |
Fitting |
|
| NW25 ISO-KF | 2 |
| NW40 ISO-KF | 9 |
| 2.75 in. OD CF | 7 |
Interface |
|
| RS232 | 1 |
| RS485 | 2 |
| EtherCAT/Analog | 7 |
Analog Output |
|
| 0.5 VDC per decade | 0 |
Relays |
|
| No relays | 2 |
| 3 relays (not available with EtherCAT) | 3 |
| 3 relays, dual anaolog out (not available with EtherCAT) | 5 |
Enclosure |
|
| Standard | 0 |
| IP54 | 2 |
| Standard with display (not available with EtherCAT) | 4 |
Specifications
-
Absolute Measurement Range1 x 10-8 Torr to Atmosphere
-
Digital CommunicationRS485, RS232 or EtherCAT
-
TypeVacuum Transducer
-
SensorCold Cathode - MicroPirani™
-
Relays3 relays, SPST
-
Installation OrientationAny
-
Set Point Range1 x 10-8 Torr to Atmosphere
-
Calibration GasNitrogen
-
Operating Temperature0-40°C (32-104°F)
-
Maximum Bakeout Temperature85°C (185°F), non-operating
-
Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
-
Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
-
Analog Output0.5 VDC per decade
-
Relay Contact Rating1 A @ 30VAC/DC, resistive
-
Power Requirements9-30 VDC, 2 W
-
Accuracy5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±5% of reading -
Repeatability5 x 10-8 Torr to 10-3 ± 30% of reading
10-3 to 100 ±2% of reading -
Overpressure Limit1500 Torr
-
Internal Volume21 cc
-
Exposed Materials304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
-
Electronic Casing and Flange304 stainless steel
-
Weight12.7 oz (360 g)
-
ComplianceCE
-
ConnectorsRS232 or RS485: 15-pin D-subminiature male
EtherCAT: One 15-pin D-subminiature male, Two RJ45 female
Features
Digital Communications
Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.
0.5 VDC per Decade Analog Output
All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Process Control Relays
The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.
Applications
Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B
The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.
Applications include:
- Analytical equipment (mass spectrometer control)
- Scanning electron microscopes
- Coating systems
- Semiconductor loadlock pressure control
- General vacuum base pressure measurement
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 971, 972, 974 Vacuum Transducer Pin-outs (60.8 kB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
- 972B DualMag™ Transducer Manual (100017133, Ref. K) (2.8 MB, PDF)
- 971B, 972B, 974B Anode/Cathode Replacement Procedure (106.8 kB, PDF)
Literature
- 970 Cold Cathode Transducers (250.9 kB, PDF)
- Vacuum Measurement Product Guide (711.5 kB, PDF)
Drawings & CADs
Device Description Files
Other
- 972B/970BNT-KIT RoHS Certificate of Compliance (525.1 kB, PDF)
- 974B/970BNT-KIT RoHS Compliance Certificate (527.4 kB, PDF)
Ultra-High Velocity