COVID-19 Coronavirus Information – Travel, health & safety precautions for MKS employees & partners. Learn More
925 Micro Pirani™ Vacuum Pressure Transducers
Overview
- Absolute measurement range from 10-5 Torr to Atmosphere
- MicroPirani sensor is resistant to damage from air inrush or vibration
- Analog, RS232, RS485, & EtherCAT® versions
- Optional integrated touch-screen display available for local pressure indication
- Three optional set point relays for process control
Products
| Compare | Model | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
925-11010 | $514 |
|
||||
|
925-11014 | $683 |
|
||||
|
|
925-11020 | $493 |
|
||||
|
|
925-11024 | $661 |
|
||||
|
|
925-11030 |
|
$536 |
|
|||
|
|
925-11034 |
|
$704 |
|
|||
|
|
925-12020 | $493 |
|
||||
|
|
925-12024 | $634 |
|
||||
|
|
925-12030 | $536 |
|
||||
|
|
925-12034 | $678 |
|
||||
|
|
925-21020 | $503 |
|
||||
|
|
925-21024 | $671 |
|
||||
|
|
925-21030 | $546 |
|
||||
|
|
925-21034 | $716 |
|
||||
|
|
925-22020 | $503 |
|
||||
|
|
925-22024 | $645 |
|
||||
|
|
925-22030 | $546 |
|
||||
|
|
925-22034 | $689 |
|
||||
|
925-31010 | $531 |
|
||||
|
925-31014 | $699 |
|
||||
|
|
925-31020 | $508 |
|
||||
|
|
925-31024 | $650 |
|
||||
|
|
925-31030 |
|
$553 |
|
|||
|
|
925-31034 |
|
$695 |
|
|||
|
|
925-32020 | $508 |
|
||||
|
|
925-32024 | $677 |
|
||||
|
|
925-32030 | $553 |
|
||||
|
|
925-32034 | $695 |
|
||||
|
|
925-41010 | $546 |
|
||||
|
|
925-41014 | $689 |
|
||||
|
|
925-41020 | $525 |
|
||||
|
|
925-41024 | $667 |
|
||||
|
|
925-41030 | $569 |
|
||||
|
|
925-41034 | $711 |
|
||||
|
|
925-42020 | $526 |
|
||||
|
|
925-42024 | $668 |
|
||||
|
|
925-42030 | $569 |
|
||||
|
|
925-42034 | $711 |
|
||||
|
|
925-51020 | $541 |
|
||||
|
|
925-51024 | $710 |
|
||||
|
|
925-51030 | $586 |
|
||||
|
|
925-51034 | $728 |
|
||||
|
|
925-52024 | $683 |
|
||||
|
|
925-52034 | $728 |
|
Configuration Options
925 Micro Pirani™ Vacuum Pressure Transducers are available with the following options.
| Configuration Option | Option Code |
|---|---|
| 925 Vacuum Pressure Transducer | 925 |
| Fitting | |
| NW16 ISO-KF | 1 |
| NW25 ISO-KF | 2 |
| 1/8 in. NPT male | 3 |
| 4 VCR female | 4 |
| 8 VCR female | 5 |
| 1.33 in. OD CF | 6 |
| NW16 ISO-KF, extended | 8 |
| Communication | |
| RS232 | 1 |
| RS485 | 2 |
| Ethercat | 7 |
| Analog Output | |
| 1-9 VDC | 0 |
| Relays | |
| 1 relay | 1 |
| No relay | 2 |
| 3 relays | 3 |
| 3 relays, dual analog out | 5 |
| Display | |
| No display | 0 |
| Display (not available with EtherCAT) | 4 |
Specifications
-
Digital CommunicationRS485/RS232 (4800 to 230400 Baud)
-
SensorMicroPirani™ (MEMS Thermal Conductivity)
-
Relays3 relays SPDT(Optional)
-
Installation OrientationAny
-
Measurement Range1.0 x 10-5 Torr to Atmosphere
-
Set Point Range5.0 x 10-4 Torr to 500 Torr
-
Calibration GasAir, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, xenon, Neon
-
Operating Temperature0° to 40°C (32° to 104°F)
-
Maximum Bakeout Temperature85°C (185°F), non-operating
-
Digital ControlsZero adjust, atmosphere adjust, pressure units, baud rate, address, factory default, gas type; set point functions: value, hysteresis, direction, enable analog output transducer status, switch, LED test
-
Digital StatusPressure reading and units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions part number, manufacturer
-
Analog Output1 to 9 VDC, 100Ω maximum output impedance, 1 volt/decade
-
Analog Output Resolution16 bit
-
Relay Contact Rating1 A @ 30VAC/DC, resistive
-
Relay Response<100 msec maximum
-
Power Requirements9 to 30 VDC, < 1.5 watts max
-
Accuracy5 x 10-4 to 10-3 Torr ±10% of reading
10-3 to 100 Torr ±5% of reading
100 Torr to atm ±25% of reading -
Repeatability10-3 to 100 Torr ± 2% of reading
-
Overpressure Limit3000 Torr absolute
-
Internal Volume(KF16) 2.80 cc
-
Exposed Materials304 stainless steel, Silicon, SiO2, Si3N4, Gold, Viton®, Low out gassing epoxy resin
-
Electronic Casing and Flange304 stainless steel
-
Weight170 g (KF 16)
-
ComplianceCE
Features
Micro Pirani™ Sensor Technology
The 925 Transducer offers a wide measurement range from 1x10-5 Torr to atmosphere that is based on measurement of thermal conductivity. The MicroPirani sensor consists of a silicon chip with a heated resistive element forming one surface of a cavity. A cover on top of the chip forms the other surface of the cavity. Due to the geometry of the sensor, convection cannot take place within the cavity and consequently, the sensor is insensitive to the mounting position. Gas molecules are passed by diffusion only to the heated element where the heat loss of the gas is measured.
Common Gas Calibrations
Like all thermal conductivity sensors, the 925 is sensitive to gas type. To compensate for gas dependency, the MicroPirani has a number of common gas calibrations that can be selected via the digital interface. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Calibration gases include: Air, Argon, Helium, Nitrogen, Hydrogen, H2O vapor, CO2, Xenon, and Neon.
Analog Pressure Output
The 925 also has a analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or controlling. Other analog outputs and curves can be selected via the digital user interface.
Process Control Relays
The 925 has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
PDR900 Power Supply & Display
The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. It can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications.
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 925 MicroPirani™ Vacuum Transducer Setup Instructions for Standard Models (196.1 kB, PDF)
- 925 Vacuum Transducer Pin-outs (73.8 kB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
- 925 MicroPirani™ Transducer Manual (100017129, Rev K) (2.5 MB, PDF)
Drawings And Cad
- 925 MicroPirani™ Vacuum Transducer Dimensional Drawing (82.7 kB, PDF)
Literature
- 925 MicroPirani™ Transducer (302.9 kB, PDF)
Ultra-High Velocity