Technical Papers

Research demonstrating that ozone can offer a more environmentally friendly alternative to existing clean ing processes and, in many instances, outperform them.

This article presents a case study for the use of ozone to reduce the amount of biofilm contaminant in a pilot UPW production and delivery system designed to represent typical large 316L stainless steel systems in biopharmaceutical companies.

High-Throughput Photoresist Strip Using a Toroidal RF Plasma Source in Ashers

Continuous Emission Monitoring for Clay Ceramic Manufacturing from Ceramics Industry Magazine

Embedded One-Class Classification on RF Generator using Mixture of Gaussians

An Optical Hydrocarbon Analyzer for Real-Time Hydrocarbon Gas Speciation and Measurement (Chinese)

Advances in Remote Plasma Sources for Cleaning 300 mm and Flat Panel CVD Systems

Conference Presentation: On-Line H2 PPB Impurity Analysis Using FTIR

Editorial from Automotive Testing Technilogy International Magazine, March, 2008

Using Dissolved Ozone in Semiconductor Cleaning Applications