Technical Papers

Research demonstrating that ozone can offer a more environmentally friendly alternative to existing clean ing processes and, in many instances, outperform them.

High-Throughput Photoresist Strip Using a Toroidal RF Plasma Source in Ashers

Continuous Emission Monitoring for Clay Ceramic Manufacturing from Ceramics Industry Magazine

Embedded One-Class Classification on RF Generator using Mixture of Gaussians

An Optical Hydrocarbon Analyzer for Real-Time Hydrocarbon Gas Speciation and Measurement (Chinese)

Advances in Remote Plasma Sources for Cleaning 300 mm and Flat Panel CVD Systems

Editorial from Automotive Testing Technilogy International Magazine, March, 2008

Using Dissolved Ozone in Semiconductor Cleaning Applications

Electronics fabrication with dissolved O3 - an environmentally friendly solution.

Learn about the care and maintenance of Baratron® Capacitance Manometers.

Ozone as the Oxidizing Precursor in Atomic Layer Deposition

Using Multivariate Process Analysis to Predict Injection Molded Part Quality

White Paper: Enhanced Detection of Trace Gases with V-lens™ Ion Optics Technology using Cirrus™ 3-XD Atmospheric Pressure Residual Gas Analyzers

Multivariate Analysis (MVA) for Quality Detection in Injection Molding Systems used in the Medical Device Community

Intro to Bayard-Alpert Ionization Gauges

Pressure Based Mass Flow Control for Ion Implant SDS Applications

Advanced Role of Ozone in Wet Processing

Ozone/TEOS CVD Oxide Deposition Using DLI

Uniformity Control with Phase-Locked RF Source on a High Density Plasma System

A Critical Evaluation of Thermal Mass Flow Meters