Contact Information

Corporate Headquarters
MKS Instruments, Inc. 2 Tech Drive, Suite 201 Andover, MA 01810 United States Tel: 978-645-5500
Automation & Control Solutions MKS Instruments, Inc.
1321 Rutherford Lane, Suite 200 Austin, TX 78753 United States Tel: 512-719-8000
Calibration and Service MKS Instruments, Inc.
90 Industrial Way Wilmington, MA 01887-4610 United States Tel: 978-645-5500
Flow, Pressure/Vacuum Measurement, and Valve Solutions MKS Instruments, Inc.
Six Shattuck Road Andover, MA 01810 United States Tel: 978-645-5500
Integrated Process Solutions MKS Instruments, Inc.
5330 Sterling Drive Boulder, CO 80301 United States Tel: 303-449-9861
Mass Spectrometry Solutions MKS Instruments, Inc.
3635 Peterson Way Santa Clara, CA 95054-2809 United States Tel: 408-750-0300
Newport Corporation 1791 Deere Avenue Irvine, CA 92606 United States Tel: 949-863-3144
Ophir-Spiricon, LLC 3050 North 300 West North Logan, UT 84341 United States Tel: 435-753-3729
Spectra-Physics 3635 Peterson Way Santa Clara, CA 95054 United States Tel: 408-980-4300
ESI 13900 NW Science Park Drive Portland, OR 97229-5497 United States Tel:503-641-4141