Contact Information

Corporate Headquarters
MKS Instruments, Inc. 2 Tech Drive, Suite 201 Andover, MA 01810 United States Tel: 978-645-5500
Automation & Control Solutions
MKS Instruments, Inc. 1321 Rutherford Lane, Suite 200 Austin, TX 78753 United States Tel: 512-719-8000
Calibration and Service
MKS Instruments, Inc. 90 Industrial Way Wilmington, MA 01887-4610 United States Tel: 978-645-5500
Flow, Pressure/Vacuum Measurement, and Valve Solutions
MKS Instruments, Inc. Six Shattuck Road Andover, MA 01810 United States Tel: 978-645-5500
Integrated Process Solutions
MKS Instruments, Inc. 5330 Sterling Drive Boulder, CO 80301 United States Tel: 303-449-9861
Mass Spectrometry Solutions
MKS Instruments, Inc. 3635 Peterson Way Santa Clara, CA 95054-2809 United States Tel: 408-750-0300
Newport Corporation 1791 Deere Avenue Irvine, CA 92606 United States Tel: 949-863-3144
Ophir-Spiricon, LLC 3050 North 300 West North Logan, UT 84341 United States Tel: 435-753-3729
Spectra-Physics 3635 Peterson Way Santa Clara, CA 95054 United States Tel: 408-980-4300