974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Pressure Transducers
Overview
The 974B QuadMag™ vacuum transducer offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani and Piezo differential sensor technologies. The 974B has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design.
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module is user serviceable to decrease downtime
- MEMS based MicroPirani sensor allows low auto cold cathode turn-on pressure
- Ease of operation via analog output, RS232, and RS485
- Optional integrated touch-screen display available for local pressure indication, etc.
- Small footprint design provides a compact transducer solution
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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974B-21020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232 | $1,477 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232
$1,663
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974B-21024 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232 | $1,663 |
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Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays
$1,526
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974B-21030 Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays |
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$1,526 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays
$1,711
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974B-21034 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays |
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$1,711 |
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974B-22020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS485 | $1,477 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS485
$1,663
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974B-22024 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS485 | $1,663 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS485, 3 Relays
$1,526
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974B-22030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS485, 3 Relays | $1,526 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS485, 3 Relays
$1,711
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974B-22034 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS485, 3 Relays | $1,711 |
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974B-71020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232 | $1,600 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS232
$1,753
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974B-71024 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS232 | $1,753 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232, 3 Relays
$1,616
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974B-71030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232, 3 Relays | $1,616 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS232, 3 Relays
$1,800
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974B-71034 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS232, 3 Relays | $1,800 |
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974B-72020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS485 | $1,562 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS485
$1,753
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974B-72024 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS485 | $1,753 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS485, 3 Relays
$1,616
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974B-72030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS485, 3 Relays | $1,616 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS485, 3 Relays
$1,800
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974B-72034 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS485, 3 Relays | $1,800 |
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974B-91020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS232 | $1,489 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS232
$1,680
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974B-91024 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS232 | $1,680 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS232, 3 Relays
$1,537
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974B-91030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS232, 3 Relays | $1,537 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS232, 3 Relays
$1,728
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974B-91034 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS232, 3 Relays | $1,728 |
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974B-92020 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS485 | $1,495 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS485
$1,645
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974B-92024 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS485 | $1,645 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS485, 3 Relays
$1,542
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974B-92030 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS485, 3 Relays | $1,542 |
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Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS485, 3 Relays
$1,729
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974B-92034 Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS485, 3 Relays | $1,729 |
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Configuration Options
The following options are available for 974B QuadMag™ Vacuum Pressure Transducers
Ordering Code Example: 974B-21034
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Configuration Option |
Option Code |
|---|---|
| 974B QuadMag Vacuum Pressure Transducer | 974B |
Fitting |
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| NW25 ISO-KF | 2 |
| NW40 ISO-KF | 9 |
| 2.75 in. OD CF | 7 |
Interface |
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| RS232 | 1 |
| RS485 | 2 |
Analog Output |
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| 0.5 VDC per decade | 0 |
Relays |
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| No relays | 2 |
| 3 relays | 3 |
| 3 relays, dual analog out | 5 |
Enclosure |
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| Standard | 0 |
| IP54 | 2 |
| Standard with display | 4 |
Specifications
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Absolute Measurement Range1.0 x 10-8 to 1500 Torr
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Differential Measurement Range-760 to +760 Torr
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Digital CommunicationRS485 or RS232
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TypeVacuum Transducer
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SensorCold Cathode - MicroPirani™ - Piezo Differential
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Relays3 relays, SPST
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Installation OrientationAny
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Set Point RangeAbsolute: 1 x 10-8 Torr to 1000 Torr
Differential: -760 to +100 Torr -
Calibration GasNitrogen
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Operating Temperature0-40°C (32-104°F)
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Maximum Bakeout Temperature85°C (185°F), non-operating
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Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
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Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
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Analog Output0.5 VDC/decade
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Relay Contact Rating1 A @ 30VAC/DC, resistive
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Power Requirements9-30 VDC, 2 W
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Accuracy5 x 10-8 Torr to 10-3: ± 30% of reading
10-3 to 50: ±2% of reading
50 to 1000 Torr: ±1% of reading -
Piezo Differential Accuracy-10 to +10 Torr: ±10% of reading
-100 to -10 Torr: ±8% of reading
-760 to -100 Torr: ±1% of reading
+10 to 100 Torr: ±5% of reading -
Piezo Differential Repeatability-760 to +10 Torr ±1% of reading
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Piezo Differential Zero Stability±0.1% of Full Scale (F.S. = 760 Torr)
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Overpressure Limit1500 Torr
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Internal Volume21 cc
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Exposed Materials304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
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Electronic Casing and Flange304 stainless steel
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Weight12.7 oz (360 g)
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ComplianceCE
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Connectors15-pin D-subminiature male
Features
Digital Communications
Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.
0.5 VDC per Decade Analog Output
All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.
Optional Integrated Touch-screen Display
The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Process Control Relays
The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.
Applications
Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B
The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.
Applications include:
- Analytical equipment (mass spectrometer control)
- Scanning electron microscopes
- Coating systems
- Semiconductor loadlock pressure control
- General vacuum base pressure measurement
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 971, 972, 974 Vacuum Transducer Pin-outs (60.8 kB, PDF)
- 974B QuadMag™ Transducer Manual (100017137, Rev. J) (2.9 MB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
- 971B, 972B, 974B Anode/Cathode Replacement Procedure (106.8 kB, PDF)
Literature
- 970 Cold Cathode Transducers (250.9 kB, PDF)
Drawings & CADs
- 974 QuadMag™ Vacuum Transducer Dimensional Drawing (253.5 kB, PDF)
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