Compare Model Drawings, CAD & Specs Display Relays Fitting Type Digital Communication Availability Price
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS232
$1,339
No 0 NW25 ISO-KF RS232
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232
$1,507
Touch-screen 0 NW25 ISO-KF RS232
Cold Cathode-MicroPirani-Piezo Transducer, 1x10-8 - 1500 Torr, NW25 ISO-KF, RS232, 3 Relays
$1,383
No 3 NW25 ISO-KF RS232
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS232, 3 Relays
$1,551
Touch-screen 3 NW25 ISO-KF RS232
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS485
$1,339
No 0 NW25 ISO-KF RS485
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS485
$1,507
Touch-screen 0 NW25 ISO-KF RS485
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW25 ISO-KF, RS485, 3 Relays
$1,383
No 3 NW25 ISO-KF RS485
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW25 ISO-KF, RS485, 3 Relays
$1,551
Touch-screen 3 NW25 ISO-KF RS485
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232
$1,418
No 0 2.75 in. CF RS232
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS232
$1,589
Touch-screen 0 2.75 in. CF RS232
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS232, 3 Relays
$1,465
No 3 2.75 in. CF RS232
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS232, 3 Relays
$1,632
Touch-screen 3 2.75 in. CF RS232
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS485
$1,416
No 0 2.75 in. CF RS485
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS485
$1,589
Touch-screen 0 2.75 in. CF RS485
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, 2.75 in. CF, RS485, 3 Relays
$1,465
No 3 2.75 in. CF RS485
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, 2.75 in. CF, RS485, 3 Relays
$1,632
Touch-screen 3 2.75 in. CF RS485
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS232
$1,350
No 0 NW40 ISO-KF RS232
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS232
$1,523
Touch-screen 0 NW40 ISO-KF RS232
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS232, 3 Relays
$1,393
No 3 NW40 ISO-KF RS232
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS232, 3 Relays
$1,566
Touch-screen 3 NW40 ISO-KF RS232
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS485
$1,355
No 0 NW40 ISO-KF RS485
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS485
$1,491
Touch-screen 0 NW40 ISO-KF RS485
vacuum gauge without display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, NW40 ISO-KF, RS485, 3 Relays
$1,398
No 3 NW40 ISO-KF RS485
vacuum gauge with display
Vacuum Transducer, Cold Cathode-MicroPirani-Piezo, Display, NW40 ISO-KF, RS485, 3 Relays
$1,567
Touch-screen 3 NW40 ISO-KF RS485

Configuration Options

Description
  vacuum gauge without display 974B Vacuum Transducer, Cold Cathode, MicroPirani, Piezo, 1x10-8 - 1500 Torr

Specifications

  • Absolute Measurement Range
    1.0 x 10-8 to 1500 Torr
  • Differential Measurement Range
    -760 to +760 Torr
  • Digital Communication
    RS485 or RS232
  • Type
    Vacuum Transducer
  • Sensor
    Cold Cathode - MicroPirani™ - Piezo Differential
  • Relays
    3 relays, SPST
  • Installation Orientation
    Any
  • Set Point Range
    Absolute: 1 x 10-8 Torr to 1000 Torr
    Differential: -760 to +100 Torr
  • Calibration Gas
    Nitrogen
  • Operating Temperature
    0° to 40°C (32° to 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F), non-operating
  • Digital Controls
    Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
  • Digital Status
    Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
  • Analog Output
    0.5 VDC/decade
  • Relay Contact Rating
    1 A @ 30VAC/DC, resistive
  • Power Requirements
    9 to 30 VDC, 2 W
  • Accuracy
    5 x 10-8 Torr to 10-3: ± 30% of reading
    10-3 to 50: ±2% of reading
    50 to 1000 Torr: ±1% of reading
  • Piezo Differential Accuracy
    -10 to +10 Torr: ±10% of reading
    -100 to -10 Torr: ±8% of reading
    -760 to -100 Torr: ±1% of reading
    +10 to 100 Torr: ±5% of reading
  • Piezo Differential Repeatability
    -760 to +10 Torr ±1% of reading
  • Piezo Differential Zero Stability
    ±0.1% of Full Scale (F.S. = 760 Torr)
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    21 cc
  • Exposed Materials
    304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic
  • Electronic Casing and Flange
    304 stainless steel
  • Weight
    12.7 oz (360 g)
  • Compliance
    CE
  • Connectors
    15-pin D-subminiature male

Features

Digital Communications

Series 970B vacuum transducers feature RS232, RS485, and EtherCAT (972B only) digital communications interface for setup of transducer parameters and to provide real time pressure measurement. The digital interface can be used to control pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; set point functions: value, hysteresis, direction, HV enable, protect, control set point, and gas type.

0.5 VDC per Decade Analog Output

All Series 970B transducers have an analog pressure output of 0.5 VDC per decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. It can emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.

Optional Integrated Touch-screen Display

The optional integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.

Process Control Relays

The Series 970B has up to three mechanical SPST relays which can be used for process control, examples are interlocking valves or pumps. Relay contacts are rated at 1 amp for 30 VAC or VDC, resistive loads.

Applications

Sensor and transducer measurement ranges. From top to bottom: 971B, 972B, and 974B

The Series 970B Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970B transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization.

Applications include:

  • Analytical equipment (mass spectrometer control)
  • Scanning electron microscopes
  • Coating systems
  • Semiconductor loadlock pressure control
  • General vacuum base pressure measurement

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