TEOS Trap

The MKS Instruments® Products TEOS Trap, when used as one element of a TEOS Effluent Management Subsystem, has proven very effective in reducing particulates and increasing uptime. The MKS Instruments TEOS Trap collects TEOS byproducts, preventing them from backstreaming into the furnace and contaminating the pump. In test cases, a greater than 20% reduction in particulates has been recorded. Maintenance is simplified, by cleaning a single component versus many feet of piping. The large trapping capacity leads to longer preventative maintenance cycles. The high trapping efficiency provides better protection to the pump, valves and other downstream instrumentation.

Configurations:

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Documents & Downloads:

Teos Trap data sheet

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.