1. Products
  2. Heater Jackets & Process Traps
  3. Foreline Process Traps

Foreline Process Traps

Trap by products of vacuum processes to prevent damage and clogging from downstream effluents

MKS Instruments patented line of process traps are highly-efficient and compact traps. Each trap is designed for specific processes in thin film manufacturing. By products are trapped inside, away from the process, pumps, gauging or anything else that can be damaged or clogged by hardened byproducts. When used in conjunction with an Effluent Management Subsystem, the results can include increased uptime, longer pump life, safer cleaning and byproduct disposal, and higher yields.

Foreline Process Traps

metal etch process trap

Metal Etch Process Traps

teos process trap

TEOS Process Traps

vapor sublimation process trap

Vapor Sublimation Process Traps

virtual wall nitrogen barrier

Nitrogen Barriers

Wet Scrubber Inlet Transitions