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metal etch process trap
Metal Etch Process Trap, Disposable Trapping Element, Effluent Management

Specifications

  • Capacity
    3 lbs. AICl3
  • Exposed Materials
    Stainless Steel, Viton®
  • Flow Conductance
    p = pressure in mTorr
    c = 1355 + 5.73p
  • Pressure Drop
    Q = gas flow rate in sccm
    = pressure in mTorr
    Dp = Q/c
  • Dry Weight
    13 lbs (5.9 kg)

Features

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