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TEOS Process Traps

Our TEOS process traps when used as one element of a TEOS Effluent Management Subsystem™, have proven very effective in reducing particulates and increasing uptime. TEOS traps collect TEOS byproducts, preventing them from backstreaming into the furnace and contaminating the pump. In test cases, a greater than 20% reduction in particulates has been recorded. Maintenance is simplified, by cleaning a single component versus many feet of piping. The large trapping capacity leads to longer preventative maintenance cycles. The high trapping efficiency provides better protection to the pump, valves and other downstream instrumentation.

TEOS Process Traps

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Showing 6 products within 2 families

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TEOS Process Traps

Improve wafer yields when used as part of a TEOS Effluent Management Subsystem
Overall yield improvement of 2-3%
Greater than 20% particle reduction

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TEOS Process Traps

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TEOS Process Trap Accessories

Replacement trap elements
Kalrez flange seals
Viton flange seals

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Show Top Products

	Compare	Description		Avail.	Price	Qty.
		100010188Replacement Kalrez Flange Seal, TEOS Trap, 6 in. body		Contact Us			100010188Replacement Kalrez Flange Seal, TEOS Trap, 6 in. body Contact Us
		100010225Replacement Element, TEOS Trap, 8 in. body, NW100		6 Weeks	$500		100010225Replacement Element, TEOS Trap, 8 in. body, NW100 6 Weeks $500
		100010228Replacement Kalrez Flange Seal, TEOS Trap, 8 in. body		Contact Us			100010228Replacement Kalrez Flange Seal, TEOS Trap, 8 in. body Contact Us
		100010441Replacement Element, TEOS Trap, 8 in. body, NW80		Contact Us	$365		100010441Replacement Element, TEOS Trap, 8 in. body, NW80 Contact Us $365
		100012369Replacement Element, TEOS Trap, 6 in. body, NW50, NW80		6 Weeks	$365		100012369Replacement Element, TEOS Trap, 6 in. body, NW50, NW80 6 Weeks $365

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TEOS Process Trap Accessories

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