Configuration Options

Description
  vapor sublimation process trap LPCVDTrap Vapor Sublimation Process Trap, Silicon Nitride and Titanium Nitride LPCVD

Specifications

  • Capacity
    6 inch: 3.0 lbs (1.4 kg) NH4C
    8 inch:10.0 lbs (4.5 kg) NH4CI
  • Flow Conductance
    p = pressure in mTorr
    6 inch: C (I/sec) = 20.74p
    8 inch:C (I/sec) = 45.63p
  • Pressure Drop
    Q = gas flow rate in sccm
    p = pressure in mTorr
    6 inch: Dp (mTorr) = 812 Q/p2
    8 inch: Dp (mTorr) = 369 Q/p2
  • Dry Weight
    6 inch: 16.5 lbs (7.5 kg)
    8 inch: 28.0 lbs (12.7 kg)
  • Cooling Water Temperature
    < 86° F (30° C)
  • Cooling Water Flow Rate
    > 6 gal/hr (400 ml/min)
  • Efficiency
    > 99%

Features

Need help?

Contact an Applications Specialist bysending us an email