e-Vision 2
General Purpose Residual Gas Analyzer (RGA)

e-Vision 2 General Purpose Residual Gas Analyzer (RGA) - click to enlarge
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The e-Vision 2 RGA is one of a new range of residual gas analysis products, from MKS Instruments, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. The e-Vision 2 RGA is designed to provide maximum value for money. The e-Vision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have served to make MKS the world leader in RGA products over the widest range of applications - from semiconductor tools or particle accelerators to general industrial applications.

Applications:

  • Leak detection of vacuum lines, welds and seals
  • Vacuum diagnostics
  • Pump down monitoring
  • Chamber bake out monitoring
  • Leak checking of coolant lines within a vacuum chamber
  • Chamber contaminant monitoring
  • Monitor cryo-pump performance
  • Monitor getter performance

Description:

Hardware:

Sensors

Field proven MKS quadrupole mass analyzers, with twin filaments as standard, ensure minimum downtime during critical diagnostic testing. The RGA is available with an optional dual detector including a faraday detector and microchannel plate electron multiplier for detection to e-14 mbar.

Electronics

Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics. This technology prevents large peaks from causing false positive measurements on small peaks.

Temperature stabilized critical components mean that signal stability and baseline drift are improved, allowing the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates.

Software

Built-in Web Application

A web interface using industry standard technology allows control of the e-Vision 2 as well as calibration, operation and data export through a non platform-specific web browser from anywhere on a network.

Using the ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the e-Vision 2.

In addition to the standard, built-in web applications, software control is also available through an optional Windows application, offering the best possible fit to any customer requirement.

EasyView

The field proven software provides basic RGA controls but with more functionality than the built-in web application:

  • Store RGA data and recall it back into the Recall viewer
  • Annotate graphs with notes
  • Run several RGAs from one software package

Configurations:

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.