The HPQ3S residual gas analyzes allows operation up to 0.008 Torr without the need for differential pumping. The field proven technology, coupled with the latest innovative Microvision 2 electronics, give data quality not previously seen in this class of instrument. The resulting system is less complex, with reduced installation requirements, offering a higher level of reliability at a substantially lower cost. In addition, the HPQ3S uses application validated correction algorithms to compensate for the sensitivity variation arising from ion-molecule interactions in the ion source at higher pressures.
HPQ3S High Pressure Residual Gas Analyzer are available with the following options.
|Configuration Option||Option Code|
HPQ3S Residual Gas Analyzer
|Thoria coated iridium||1|
|Simple elbow and no gauge||090|
|F-Chamber with GP Micro-ion gauge||09A|
|F-Chamber with MKS 909A ion gauge||09B|
Additional gauge options are available. Please consult factory for ordering information.
MKS was the first company to offer an RGA compatible with modern Ethernet based, web-enabled, wide area network installations. HPQ3 continues this development to a level that offers the highest flexibility and connectivity through the use of industry standard communication hardware and software. HPQ3 optimizes the roles required of a complex sensor by having two dedicated processors;
The advantages of this design approach are fast, accurate data from a robust RGA sensor using industry standard, flexible communication protocols. HPQ3 also provides a complete range of additional digital and analog connections for integrating into systems with flexible low cost solutions.
The new RF design in the HPQ3 covers the 1-100 amu mass range without compromising the quality of gas peak separation at very low mass or high mass. The field proven High Pressure Quadrupole analyser design in the HPQ3 retains the robust and inexpensive ion source design with dual filaments. This allows continuous uninterrupted operation without needing to regularly replace filaments before their normal expected lifetime. For specific higher pressure applications up to 1e-2 mbar the HPQ3S makes real-time corrections using a gauge pressure from the tool or by using a variety of optional independent gauges fitted to a custom F-Chamber designed for optimum performance with the HPQ3S.
The patented wide dynamic range detector electronics allow detection of single figure parts per million chamber leaks or contaminants, even when simultaneously measuring major gas peaks in the e-3 mbar range. This is possible in a single scan or peak jump data acquisition with less than 20 ms between the maximum and minimum signal levels and without the need for an expensive electron multiplier which needs frequent calibration and replacement.
A web interface using industry standard technology allows set-up and control of the HPQ3 from anywhere on a network. Using a non platform-specific web browser, calibration, operation and saving real time data to an export format is all possible. Using the documented Software Developer’s Kit, ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the HPQ3 and HPQ3S.
A Windows-based comprehensive software platform offering complete control of all RGA parameters:
A specialized, turn-key tool-integration software package (PC or server based) providing optimized methods to get the most reliable information from RGAs and other sensors on process tools: