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microvision 2 residual gas analyzer
Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2

Specifications

  • Mass Range
    Double: 100, 200, 300 amu
    5" Single: 100, 200 amu
    Triple: 100, 200, 300 amu
  • Faraday
    1.5 x 10-11 Torr
  • Filaments
    Tungsten or Thoria coated Iridium
  • Maximum Analyzer Operating Pressure
    7.6 x 10-5 Torr
  • Ion Source Sensitivity
    2.0 x 10-4 A/mbar
  • Minimum Detectable Concentration
    3 standard deviations of baseline noise at 300 ms integration
  • Resolution
    Better than 10% valley for peaks of equal height across mass range
  • Bake Out Temperature
    250°C (with extender or electronics removed)
  • Operating Temperature
    200°C Faraday only with electronics 10-40°C 150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar 90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar
  • UHV Out-gassing Rate
    < 1.0 x 10-9 mbar -l/s
  • Microchannel plate
    3.8 x 10-14 Torr
  • Single channel EM
    7.6 x 10-15 Torr (triple version)
  • Mounting Flange
    DN 40 CF-F

Features

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