The Microvision 2 Residual Gas Analyzer is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. In addition, the Microvision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA.
Microvision 2 has field proven quadrupole mass analyzer designs with pre-filters and optional post filters for:
Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics:
A web interface using industry standard technology allows control of the Microvision 2 as well as calibration, operation and data export through a non platform-specific web browser from anywhere on a network.
Using the documented ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the Microvision 2.
In addition to the standard, built-in web applications, software control is also available through three Windows applications, offering the best possible fit to any customer’s requirements.
EasyView – provides basic RGA controls but with more functionality than the built-in web application:
Process Eye Professional – offering complete control of all RGA parameters:
TOOL web RGA – specialized tool integration software providing optimized methods to get the most reliable information from RGAs on process tools: