Configuration Options

  hpq3 high pressure residual gas analyzer HPQ3 Residual Gas Analyzer, 0-100 amu, 0.001 Torr Maximum Pressure


  • Mass Range
    1-100 amu
  • Detector
  • Maximum Analyzer Operating Pressure
    0.001 Torr (0.0013 mbar)
  • Minimum Detectable Partial Pressure
    8e-11 Torr (1e-10 mbar)
  • Minimum Detectable Concentration
    5ppm at 0.001 Torr (0.0013 mbar)
  • Mass Stability
    ±0.1 amu over 8 hours at stable ambient
  • Resolution
    Better than 10% valley for peaks of equal height across mass range
  • Software
    Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software Process Eye Professional and TOOLweb RGA Windows software packages for Windows xP, Vista or Win7 (32 and 64bit.)
  • Bake Out Temperature
    250°C with electronics removed
  • Filaments
    Twin Tungsten or Thoria Coated Iridium
  • Power Requirements
    24V DC, 3A external universal voltage supply (included)
  • Operating Temperature
    Electronics: 10-40°C
  • Maximum Operating Conditions
    80% RH (non condensing)
  • Communication
    10/100 Base-T Ethernet, static or automatically assigned IP addresses
  • Compliance
    CE (control unit)
  • Mounting Flange
    DN38CF (70mm/2.75inch OD) Conflat
  • Data Acquisition Method
    Dedicated real time acquisition processor
  • Data Acquisition Speed
    < 3ms per point for analog or barchart scanning
  • Data Collection Methods
    Analog scanning, partial or full mass range 8, 16 or 32 points/amu Barchart scanning, partial or full mass range Peak-jump collection of any combination of peaks at up to 15 per acquisition set
  • Settling Time
    < 20ms to 1 ppm of Maximum Signal
  • Control Method
    CE operating system processor with web-server interface
  • Command Structure
    Documented SDK and ASCII command protocols
  • Filament Protection
    Dedicated x-Trip with optional pressure sensor for use with cryo-pump isolation valve.


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