Residual Gas Analysis (RGA) is a routine diagnostic tool for any vacuum engineer but the traditional upper working limit of 1e-4 mbar total pressure is restrictive for many process applications. The HPQ3 RGA allows operation up to 0.001 Torr without the need for differential pumping. The field proven technology of the HPQ analyser coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The resulting system is less complex, with reduced installation requirements, offering a higher level of reliability at a substantially lower cost.
HPQ3 High Pressure Residual Gas Analyzer are available with the following options.
|Configuration Option||Option Code|
HPQ3 Residual Gas Analyzer
|Thoria coated iridium||1|