HPQ3 High Pressure RGA
(<1 mTorr)

HPQ3 High Pressure RGA (<1 mTorr) - click to enlarge
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High pressure compact quadrupole process monitors without differential pumping.

HPQ3 allows operation far beyond the 1e-4 mbar total pressure limit of other residual gas analyzers without the need for differential pumping. Field-proven technology coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The HPQ3 has a variety of software control options to match the requirements of any application.

HPQ3 can be used for processes where data is required up to a total pressure of 1.3e-3mbar.

Features & Benefits:

  • Easily installed
  • Web interface for setup and control on any network
  • High reliability & low cost


The HPQ3 and HPQ3S are suitable for a wide range of applications in PVD or for vacuum systems with inert residual gases including:

  • Leak detection
  • Vacuum diagnostics
  • Pump down monitoring
  • Process monitoring
  • Rate-of rise testing


Purchase now or request a quote:
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Part NumberPriceQTY
HPQ3 High Pressure RGA (<1 mTorr)Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.