HPQ3 High Pressure RGA
High pressure compact quadrupole process monitors without differential pumping.
HPQ3 allows operation far beyond the 1e-4 mbar total pressure limit of other residual gas analyzers without the need for differential pumping. Field-proven technology coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The HPQ3 has a variety of software control options to match the requirements of any application.
HPQ3 can be used for processes where data is required up to a total pressure of 1.3e-3mbar.