TOOLweb® RGA is an automated platform for the control and monitoring of process-specific RGA and other general sensors on various semiconductor tools. Comprising of sensor hardware, a tool connectivity module and software for real-time control and web-based data review, TOOLweb® RGA monitors the tool chamber environment both during and between periods of wafer processing and after a pump-down.
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Through continuous communication with the tool, TOOLweb RGA is able to link process gas data with wafer logistics information and alarm or warn the tool in the event of a process excursion. Additionally, it can access other tool data (VIDs) using it for fault detection and sensor calibration, and incorporating it into TOOLweb RGA web-based reports. Wafer logistics information, tool VIDs, and the communication of “events” (e.g., wafer process start) are all required to drive the RGA state engine logic and ensure that there is correlation between sensor data and wafer specific information in the database. Additionally, TOOLweb RGA can send information in real-time to the tool, Fab host or an APC platform. Such information might include alarms, calculated indices, events, or sensor data.
The TOOLweb RGA real-time applications operate through the Process Eye Professional™ sensor control platform to ensure all installed sensors deliver stable, high quality data at all times. Included in the real-time applications is a fault detection and classification capability with multiple possible actions to be taken in the event of a process excursion.
A web-based application is provided to configure TOOLweb RGA and to make adjustments to alarm settings as well as the selection and configuration of tool VIDs for tracking. Real-time application features:
The tool dashboard provides an instant view of the status of the tool, the health of each sensor, and the latest alert status for the chambers. It also provides an automated Pareto analysis of the warnings and alarms from the sensors being monitored on the tool. Instead of running a report for each chamber or process, a web page link makes it possible for engineers to see at a glance any recurring problems and to drill down further into the data. From the tool dashboard it is possible to link to all of the TOOLweb RGA web pages.
The web-applications included with the TOOLweb RGA product suite offer data reporting and database search capabilities and are accessible from any location on a network (or over the internet) using a web browser with no requirement for software installation or downloading. Web-applications typically run on the same control PC as the real-time applications, however, the database and data files may be located on a separate server on the same network.
Data Summary Reports
Summary Alarm Search
Complex FDC Modeling