Differential capacitance manometers can be connected to any pressure or vacuum source for use as the reference pressure. These manometers read the difference in pressure between the inlet tube and the reference cavity at the backside of the electrode. Differential pressure transducers can be used to measure either the true differential pressure or vacuum between two locations, or the reference side of the product can be left open to provide a true reference to local atmospheric pressure. Applications include air and gas flow measurements for filters and analytical systems, downstream pressure control in thin film processing systems, and automated leak testing systems.
The patented capacitance sensor is built entirely from Inconel® nickel alloys on its measurement side, which offers superior corrosion resistance over long periods of time. Inconel® construction also offers high overpressure tolerances that reduce errors due to line pressure spikes, and high burst pressure ratings that contribute to overall system safety.
Three (3) different analog output signals (0-1 VDC, 0-5 VDC, and 0-10 VDC) are included for use in nearly any control or data acquisition system.
These Baratron® differential capacitance manometers can be equipped with any of twelve (12) different fittings on either the measurement or reference sides, including common industrial and semiconductor-industry standards like VCR®, NW-KF, VCO®, and NPT.
Two (2) independently-adjustable trip relays are included for control of external equipment and components based on a pressure trip point. The trip points are adjustable from -100% to +100% of the full-scale measurement range. The DPDT relay contacts are rated at 1.0 amp at 30 VDC or 0.3 amp at 120 VAC.
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.