Compare Model Drawings, CAD & Specs Full Scale Range Fitting Type Availability Price
Differential Pressure Transducer, 10 Torr, 0.5 in. OD Tube, 0-10 VDC, Bakeable
$1,775
3 Weeks
221BD-00010A Differential Pressure Transducer, 10 Torr, 0.5 in. OD Tube, 0-10 VDC, Bakeable 10 Torr 0.5 in. OD tube
3 Weeks
$1,775
Differential Pressure Transducer, 10 Torr, 8 VCR-F, 0-10 VDC, Bakeable
$1,950
3 Weeks
221BD-00010B Differential Pressure Transducer, 10 Torr, 8 VCR-F, 0-10 VDC, Bakeable 10 Torr 8 VCR female
3 Weeks
$1,950
Differential Pressure Transducer, 10 Torr, NW16 ISO-KF, 0-10 VDC, Bakeable
$1,950
3 Weeks
221BD-00010D Differential Pressure Transducer, 10 Torr, NW16 ISO-KF, 0-10 VDC, Bakeable 10 Torr NW16 ISO-KF
3 Weeks
$1,950
Differential Pressure Transducer, 100 Torr, 0.5 in. OD Tube, 0-10 VDC, Bakeable
$1,775
3 Weeks
221BD-00100A Differential Pressure Transducer, 100 Torr, 0.5 in. OD Tube, 0-10 VDC, Bakeable 100 Torr 0.5 in. OD tube
3 Weeks
$1,775
Differential Pressure Transducer, 10 Torr, 8 VCR-F, 0-10 VDC, Bakeable
$1,950
3 Weeks
221BD-00100B Differential Pressure Transducer, 10 Torr, 8 VCR-F, 0-10 VDC, Bakeable 100 Torr 8 VCR female
3 Weeks
$1,950
Differential Pressure Transducer, 100 Torr, NW16 ISO-KF, 0-10 VDC, Bakeable
$1,950
3 Weeks
221BD-00100D Differential Pressure Transducer, 100 Torr, NW16 ISO-KF, 0-10 VDC, Bakeable 100 Torr NW16 ISO-KF
3 Weeks
$1,950
Differential Pressure Transducer, 1000 Torr, 0.5 in. OD Tube, 0-10 VDC, Bakeable
$1,775
3 Weeks
221BD-01000A Differential Pressure Transducer, 1000 Torr, 0.5 in. OD Tube, 0-10 VDC, Bakeable 1000 Torr 0.5 in. OD tube
3 Weeks
$1,775
Differential Capacitance Manometer, 1000 Torr, 8 VCR Fitting, Bakeable to 150°C
$1,950
3 Weeks
221BD-01000B Differential Capacitance Manometer, 1000 Torr, 8 VCR Fitting, Bakeable to 150°C 1000 Torr 8 VCR female
3 Weeks
$1,950
Differential Capacitance Manometer, 1000 Torr, NW16 ISO-KF, Bakeable to 150°C
$1,950
3 Weeks
221BD-01000D Differential Capacitance Manometer, 1000 Torr, NW16 ISO-KF, Bakeable to 150°C 1000 Torr NW16 ISO-KF
3 Weeks
$1,950

Product Options

Description
  221B Differential Capacitance Manometer, 10-25,000 Torr, Remote Electronics, Bakeable to 150°C

Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Industrial Capacitance Manometer
  • Measurement Type
    Differential
  • Full Scale Pressure Ranges
    10, 100, 1000, 5000, 10000, 15000, 20000 and 25000 Torr
  • Accuracy
    0.5% of Reading (± temperature coefficients)
  • Resolution
    0.01% of Full Scale
  • Analog Output
    0 to 10 VDC into > 10K Ω load
  • Electrical Connector
    AMP 14-pin ribbon connectors; MKS Connector Kit, 221B-K1
  • Zero Temperature Coefficient
    0.02% of Full Scale/°C
  • Span Temperature Coefficient
    0.04% of Reading/°C
  • Volume
    Measurement Side (Px): 7.9 cc
    Reference Side (Pr): 19.0 cc
  • Overpressure Limit
    Full Scale ranges less than 1000 Torr: 120% of Full Scale or 20 psi (140 kPa), whichever is greater
  • Power Requirements
    ±15 VDC @ 35 mA regulated ±2%
  • Compliance
    EMC Directive 2014/30/EU

Features

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent absolute pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Differential Pressure Measurement

Differential capacitance manometers can be connected to any pressure or vacuum source for use as the reference pressure. These manometers read the difference in pressure between the inlet tube and the reference cavity at the backside of the electrode. Differential pressure transducers can be used to measure either the true differential pressure or vacuum between two locations, or the reference side of the product can be left open to provide a true reference to local atmospheric pressure. Applications include air and gas flow measurements for filters and analytical systems, downstream pressure control in thin film processing systems, and automated leak testing systems.

All-Inconel® Wetted Surfaces

These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

High Temperature Sensor with Remote Electronics

The pressure sensor and electronics of these capacitance manometers are separated by an eight foot cable, which allows the electronics to be mounted away from sources of heat. Remote electronics allow the sensor to operate at ambient temperatures up to 150°C.  The sensir is also bakeable to 200°C with the cable removed.

14-pin Micro Connector Pin-Outs

Pin Description
1 Chassis Ground
2 DC Common
3 No Connection
4 No Connection
5 +15 VDC
6 -15 VDC
7 Pressure Output
8 Chassis Ground
9 DC Common
10-14 No Connection

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