902B Absolute Piezo Vacuum Transducer
(0.1 to 1000 Torr)
Pressure/vacuum gauges with MEMS-based Piezo sensors


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The MKS 902B Piezo transducer combines the pressure measurement technology of a MEMS-based Piezo sensor with a metal sealed stainless steel 316 diaphragm and integrated electronics. The 902B provides economical, absolute pressure measurement that is independent of gas type.

Features & Benefits:

  • Low cost transducer alternative to more expensive conventional transducers
  • Gas independent pressure measurement for accurate, total pressure measurement
  • Sensor is suitable for harsh processes due to robust design and stainless steel construction
  • Solid state Piezo sensor resistant to damage from air inrush and vibrations
  • Compact system design with integrated electronics and sensor in one unit
  • Mountable in any orientation for ease of installation
  • Reduced process cycle time due to sensor's fast, accurate and repeatable pressure measurements
  • Ease of operation with both analog output and digital communication
  • Multiple analog output emulations available
  • Process control with up to three set point relays with fast response time
  • Optional display version

Applications:

With a measurement range of 0.1 to 1000 Torr full scale, the 902B sensor is ideal for a wide range of applications including semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, automotive and aerospace.

VCR® is a registered trademark of Swagelok® Company.

Configurations:

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Part NumberFlangeInterfaceAnalog OutputConnector & RelaysEnclosure & Display3D ModelPriceQTY
902B-11010KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11012KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP54 Enclosure
No display
902B-KF16.stpQuote Only
902B-11014KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-11020KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11024KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-11030KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11032KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP54 Enclosure
No display
902B-KF16.stpQuote Only
902B-11034KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-11054KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
Dual analog output
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-11090KF16 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
Hirschmann 6 pin
no relays
(Pfeiffer, Inficon type)
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11180KF16 RS232/Analog0-5 VDC
(Linear 5 mV/Torr)
RJ45/FCC68 8 pin
no relays
(Edwards, Oerlikon type)
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11280KF16 RS232/Analog2-10 VDC
(LOG10)
RJ45/FCC68 8 pin
no relays
(Edwards, Oerlikon type)
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11410KF16 RS232/Analog1 VDC/decadeSUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11480KF16 RS232/Analog1 VDC/decadeRJ45/FCC68 8 pin
no relays
(Edwards, Oerlikon type)
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-11590KF16 RS232/Analog0-10 VDC
(Linear 100 mV/Torr)
Hirschmann 6 pin
no relays
(Pfeiffer, Inficon type)
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-12010KF16 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-12014KF16 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-12020KF16 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-12024KF16 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-12030KF16 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-KF16.stpQuote Only
902B-12034KF16 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
Display included
902B-1xx4KF16.stpQuote Only
902B-310101/8 Inch NPT RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-310141/8 Inch NPT RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-3xx4NPT.stpQuote Only
902B-310201/8 Inch NPT RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-310241/8 Inch NPT RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-3xx4NPT.stpQuote Only
902B-310301/8 Inch NPT RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-314801/8 Inch NPT RS232/Analog1 VDC/decadeRJ45/FCC68 8 pin
no relays
(Edwards, Oerlikon type)
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-320101/8 Inch NPT RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-320141/8 Inch NPT RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-3xx4NPT.stpQuote Only
902B-320201/8 Inch NPT RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-320241/8 Inch NPT RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-3xx4NPT.stpQuote Only
902B-320301/8 Inch NPT RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-NPT.stpQuote Only
902B-41010VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-41014VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-4xx4VCR4.stpQuote Only
902B-41020VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-41024VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-4xx4VCR4.stpQuote Only
902B-41030VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-41034VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
Display included
902B-4xx4VCR4.stpQuote Only
902B-41050VCR4 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
Dual analog output
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-42010VCR4 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-42014VCR4 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-4xx4VCR4.stpQuote Only
902B-42020VCR4 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-42024VCR4 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-4xx4VCR4.stpQuote Only
902B-42030VCR4 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-VCR4.stpQuote Only
902B-42034VCR4 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
Display included
902B-4xx4VCR4.stpQuote Only
902B-51010VCR8 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-VCR8.stpQuote Only
902B-51014VCR8 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-5xx4VCR8.stpQuote Only
902B-51020VCR8 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-VCR8.stpQuote Only
902B-51024VCR8 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
Display included
902B-5xx4VCR8.stpQuote Only
902B-51030VCR8 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-VCR8.stpQuote Only
902B-51034VCR8 RS232/Analog0-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
Display included
902B-5xx4VCR8.stpQuote Only
902B-52010VCR8 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
No display
902B-VCR8.stpQuote Only
902B-52014VCR8 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD 9 pin male
1 relay
IP40 Enclosure
Display included
902B-5xx4VCR8.stpQuote Only
902B-52020VCR8 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
no relays
IP40 Enclosure
No display
902B-VCR8.stpQuote Only
902B-52030VCR8 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
No display
902B-VCR8.stpQuote Only
902B-52034VCR8 RS4850-10 VDC
(Linear 10 mV/Torr)
SUBD HD 15 pin male
3 relays
IP40 Enclosure
Display included
902B-5xx4VCR8.stpQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 303-652-4400.