AX2500 Series SmartPower® Microwave Generators

MKS AX2500 Series SmartPower Microwave Generator - click to enlarge
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SmartPower® AX2500 Series intelligent microwave power generators are built on MKS' experience in designing rugged, reliable microwave power generators for demanding semiconductor fabrication and industrial applications. The compact AX2500 design architecture incorporates MKS field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.

The SmartPower AX2500 Series consists of three models which cover a spectrum of continuous microwave power from 180 W to 6 kW. The AX2518 has maximum performance of 1.8 kW, the AX2530 3 kW, and the AX2560 6 kW. Frequency output is 2.455 GHz ±15 MHz.


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Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.