Compare Model Drawings, CAD & Specs Availability Price
915 mhz industrial microwave generator
Microwave Generator, Industrial, 15 kW, 915 MHz
915 mhz industrial microwave generator
Microwave Generator, Industrial, 30 kW, 915 MHz
915 mhz industrial microwave generator
Microwave Generator, Industrial, 50 kW, 915 MHz
915 mhz industrial microwave generator
Microwave Generator, Industrial, 75 kW, 915 MHz

Specifications

  • Type
    GS Series (GS150, GS300, GS500, GS750)
  • Frequency
    915 MHz
  • Input Power
    3x400 VAC, 50/60 Hz
    3x480 VAC, 50/60 Hz
  • Exit Flange
    CPR 975

Features

Conductively Cooled Design

The patented conductively cooled design of the plasma tube supports high throughput and high power (up to 3kW) operation. The wide process window allows for AX7610 use in multiple applications, ranging from fast PR and polymer removal from 300mm wafers to fine-control low-k or atomic layer CVD processes.

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