SmartMatch® module is an advanced microwave matching unit which utilizes phase-magnitude detection hardware and an advanced predictive tuning algorithm to provide fast, reliable and repeatable matching. Available for power levels up to 6kW, with user selectable operating modes and reflected power threshold, the SmartMatch® module has been qualified to provide fast, reliable tuning with multiple plasma loads including O2, N2, CF4, NF3, H2O, NH3, N2H2 (and many others). Typical matching speed is below 1 second.
Fast, reliable matching, even for difficult plasma loads
Hands-off operation with no separate controller needed for increased accuracy and lower CoO
Advanced predictive algorithm complete with powerful micro-controller and fast stub moving mechanism