Microwave Power Generator, 1.8 kW, 2455 MHz
Model: AX2518
Microwave Power Generator, 1.8 kW, 2455 MHz
Microwave Power Generator, 1.8 kW, 2455 MHz
Model: AX2518
Overview
Overview
The SmartPower® AX2518 Microwave Generator supports demanding semiconductor fabrication and industrial applications with 180 W to 3 kW at 2440 to 2470 MHz. The compact AX2500 design architecture incorporates MKS field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.
Technical Specs
-
TypeMicrowave Generator
-
Maximum Plasma Power Output1.8 kW
-
Power Output±1.5% (from 20 - 100% of max. power)
-
Frequency2440 - 2470 MHz
-
Ripple±1% of output power
-
Ambient Temperatureup to 40°C max.
-
Generator to Head DistanceUp to 100 feet maximum
-
Microwave ConnectionsWR284F waveguide with CPR284F flanges
-
Power Requirements200/208 VAC ±10%, 3 phase, 50/60 Hz
-
ComplianceCE, ETL, Semi S2-93A, F47
-
Power Supply Generator Dimensions7.0 x 19 x 23 in. (178 x 483 x 584 mm) (height x width x depth)
-
Power Head Magnetron Head Dimensions10 x 7.62 x 14.5 in. (254 x 193.5 x 368.3mm) (height x width x depth)
-
Power Head Magnetron Head CoolingWater, 1.5 gpm, 30°C maximum @ 30 psid minimum
-
Remote ControlAnalog, RS485, DeviceNet™
Ultra-High Velocity