3-zone Flow Ratio Controller
For Process Optimization of Critical Deposition and Etch Processes
The DELTA™ III Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-browser products. Available with EtherCAT® or DeviceNet™ communications, this device provides the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity control.
The DELTA™ series mass flow ratio controllers divide and control mixed process gas flows to either multiple chambers or zones within a process chamber at proportions specified by the user to optimize process uniformity and repeatability. The DELTA™ series flow ratio controllers with their superior performance and compact design are the latest offerings from MKS's industry leading DELTA™ controllers enabling process gas flow ratio control.