New DELTA™ IV 4-zone Flow Ratio Controller

Overview
Products
Features
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Related

delta iv 4-zone flow ratio controller with ethercat

delta iv 4-zone flow ratio controller with devicenet

Overview

DELTA™ IV 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. It is available in EtherCAT® or DeviceNet™ providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution.

Accurate & repeatable 4-zone flow ratio control
Control flow proportion independent of the process gas mix
Analog, EtherCAT® or DeviceNet™ communications
Digital control loop for rapid response to channel set point
Embedded diagnostics and software to check functionality without removal

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Products

		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Full Scale Flow Range	Channels	Availability	Featured Item	Price		Brand
		DLT4B Flow Ratio Controller, 4-zone, EtherCAT Contact Us	DLT4B Flow Ratio Controller, 4-zone, EtherCAT	UNIVERSAL	0.0	1.0	0.0		0.0	Flow Ratio Controller	500, 1000, 2000, and 10,000 sccm per channel (N2 equivalent)	4	Contact Us
		DLTNA4 Flow Ratio Controller, 4-zone, DeviceNet Contact Us	DLTNA4 Flow Ratio Controller, 4-zone, DeviceNet	UNIVERSAL	0.0	1.0	0.0		0.0	Flow Ratio Controller	500, 1000, 2000, and 10,000 sccm per channel (N2 equivalent)	4	Contact Us

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Specifications

Full Scale Flow Range

500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
Maximum Operating Outlet Pressure

200 Torr at maximum flow rate through all channels
Maximum Allowable Outlet Pressure Differential

50 Torr with the same percentage flow through all channels
Normal Operating Pressure Differential

<150 Torr, Except, <450 Torr for 10K/10K
Ratio Control Range

0, 5 to 100% Full Scale
Ratio Accuracy

± 2% set point (for percent set points above 10%)
Ratio Repeatability & Reproducibility

±0.3% of set point
Resolution

0.02% of channel Full Scale
Zero Temperature Coefficient

0.05% Full Scale/°C (500 ppm)
Span Temperature Coefficient

<0.08% of Reading/°C (800 ppm)
Typical Settling Time

<3 seconds (typical dependent on downstream conductance matching)
Warm-up Time

60 minutes
Operating Temperature

10-40°C

Storage Temperature

-20-65°C
Storage Humidity

0-95% relative humidity, non-condensing
Temperature Accuracy

+2°C
Temperature Resolution

0.1°C
Fitting Type

4 VCR male, non-rotatable
External Leak Integrity

<1x10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<2% of channel Full Scale at 500 Torr differential to <10 Torr
Wetted Materials

316 Stainless Steel VAR, 316 Stainless Steel nickel, Inconel®, KM-45, PTFE
Surface Finish

5 microinch average Ra
Connector

5 pin microconnector
Set Point Command Signal

Digital
Communication

DeviceNet or EtherCAT
Compliance

CE

Specifications

Full Scale Flow Range

500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
Maximum Operating Outlet Pressure

200 Torr at maximum flow rate through all channels
Maximum Allowable Outlet Pressure Differential

50 Torr with the same percentage flow through all channels
Normal Operating Pressure Differential

<150 Torr, Except, <450 Torr for 10K/10K
Ratio Control Range

0, 5 to 100% Full Scale
Ratio Accuracy

± 2% set point (for percent set points above 10%)
Ratio Repeatability & Reproducibility

±0.3% of set point
Resolution

0.02% of channel Full Scale
Zero Temperature Coefficient

0.05% Full Scale/°C (500 ppm)
Span Temperature Coefficient

<0.08% of Reading/°C (800 ppm)
Typical Settling Time

<3 seconds (typical dependent on downstream conductance matching)
Warm-up Time

60 minutes
Operating Temperature

10-40°C

Storage Temperature

-20-65°C
Storage Humidity

0-95% relative humidity, non-condensing
Temperature Accuracy

+2°C
Temperature Resolution

0.1°C
Fitting Type

4 VCR male, non-rotatable
External Leak Integrity

<1x10^-10 (scc/sec He)
Leak Integrity Through Closed Valve

<2% of channel Full Scale at 500 Torr differential to <10 Torr
Wetted Materials

316 Stainless Steel VAR, 316 Stainless Steel nickel, Inconel®, KM-45, PTFE
Surface Finish

5 microinch average Ra
Connector

5 pin microconnector
Set Point Command Signal

Digital
Communication

DeviceNet or EtherCAT
Compliance

CE

Features

Control Flow to Four Zones

The DELTA IV, four channel ratio controller provides a needed “knob” to tune process gas flows over the substrate surface or gas dispersion head to help achieve these uniformities. The DELTA IV ratio controller provides closed loop control over the flow proportion that is not available with typical metering valve or flow orifice setups that have often been used. The DELTA ratio controllers provide the added advantage of tuning the process from the tool controller as opposed to manual valve adjustment necessary with metering valve and manual changeout which is impractical with fixed flow orifices.

The DELTA IV flow ratio controller is shown here with its four flow outputs providing flow to center (C) and outer (O) zones within a process chamber for a dual wafer chamber or a dual chamber configuration.

Wide Dynamic Ratio Control Range

The DELTA IV has a wide dynamic ratio control range and fast development of chamber flow while being adaptive to different tool and process conditions. MKS has developed a unique patent pending ratio control logic enabling rapid ratio and flow response times. This control logic enables the total input flow to be split with channel flows ranging from 2 to 100% of the channel Full Scale for measurement and control purposes. The total of all channel flows shall be split in such a way that their sum equals 100%. For example the flows may be split to 10, 20, 30 and 40% of total flow input going to channels Q1, Q2, Q3 and Q4, respectively. The dynamic control also allows for individual channels to be given 0% set points which closes the valve, effectively closing off flow to this output.

Above, the device starts with flows of 20, 30, 10 and 40% in channels, Q1, Q2, Q3 and Q4 respectively. The flow then transitions to 25% in each channel followed by a transition to 10, 20, 30 and 40% in each channel.

In-Situ Embedded Diagnostics

The DELTA’s diagnostic feature allows the user to check the DELTA’s performance in-situ, lowering costs through reduced removal of No Problem Found devices. This feature is enabled through a web browser utility accessed through the device’s Ethernet port. This utility uses a standard web browser and requires no special software. The diagnostic input includes the ability to control the device locally, operate the device, open and close valves along with collecting and saving data for later analysis.