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delta ii 2-zone flow ratio controller with devicenet
Flow Ratio Controller, 2 Channels, DeviceNet
delta ii 2-zone flow ratio controller with ethercat
Flow Ratio Controller, 2 Channels, EtherCAT

Specifications

  • Full Scale Flow Range
    500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, or 10000/10000 sccm (N2 equivalent)
  • Maximum Operating Outlet Pressure
    200 torr
  • Maximum Allowable Outlet Pressure Differential
    50 torr (between Q1 and Q2)
  • Normal Operating Pressure Differential
    <150 torr (<450 torr for 10000/10000) (N2)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Input Flow Range
    5 to 100% of each channel Full Scale rating (N2 equivalent)
  • Ratio Control Range
    1:1 to 20:1 and 20:1 to 1:1
  • Ratio Accuracy
    2% of ratio set point
  • Typical Accuracy
    0.3% of ratio set point
  • Ratio Repeatability & Reproducibility
    0.02% of channel Full Scale
  • Zero Temperature Coefficient
    0.05% Full Scale/°C
  • Span Temperature Coefficient
    0.08% Reading/°C
  • Typical Settling Time
    <2 seconds
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10 to 40°C
  • Storage Temperature
    -20 to 65°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Temperature Display
    0 to 100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male (non-rotatable)
  • Display
    4 digits for value, 4 characters for unit
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of Channel FS at 400 torr differential
  • Wetted Materials
    316 stainless steel VAR, 316 stainless steel, Inconel®, KM-45, PTFE
  • Surface Finish
    5 microinch average Ra
  • Weight
    5 lbs. (2.3 kg)
  • Connector
    Digital I/O: 5-pin microconnector (DeviceNet), Analog: 9-pin D male, EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
  • Power Requirements
    Digital I/O: 11-25 VDC, Analog: +15 to 24 VDC±5%
  • Power Consumption
    9 Watts
  • Set Point Command Signal
    Digital I/O: Digital, Analog: 0 to 5 VDC or 0 to 10 VDC
  • Communication
    Analog, DeviceNet, or EtherCAT

Features

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