Vision 2000-C™ and Vision 2000-E™ RGA
RGA for CVD and Etch Processes
Vision 2000-C™ and Vision 2000-E™ incorporate "smart head" RGA technology from Microvision 2 with a closed ion source and close-coupled inlet. This state-of-the-art RGA technology is integrated with Process Eye™ Professional control platform, a recipe-based, user-configurable software program. The combination of closed ion source and automated inlet allows seamless monitoring of the complete CVD or Etch process cycle, from base vacuum to process pressures of up to 700 Torr.