Vision 2000-B RGA
Vacuum Baseline Monitor for Process Tools


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Vision 2000-B tracks levels of potentially damaging residual gases that negatively impact the quality. It features "smart head" technology from Microvision 2. The electronics unit mounts directly onto the analyzer head, and connects to the system PC via ethernet.

Features & Benefits

  • Housings & heater jacket meet needs of any process tool and vacuum baseline application
  • Capable of simultaneous multiple-sensor operations
  • Integration with tools for interdiction and alarms

Applications:

Vision 2000-B is an application-specific instrument that monitors vacuum pumpdown, baseline, and leakback conditions on semiconductor and thin film process tools, and alerting to conditions that impact yield.