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vision 2000-p rga for select pressure & pvd
Process Monitor, Select Pressure & PVD Applications, Vision 2000-P™

Specifications

  • Mass Range
    Standard: 1-100 amu
    Optional: 1-200 and 1-300 amu
  • Detector
    Dual (Faraday and secondary electron multiplier)
  • Maximum Analyzer Operating Pressure
    7.6e-3 Torr (1e-2 mbar) at the ion source inlet (standard), higher pressure optional
  • Minimum Detectable Partial Pressure
    <2e-11 Torr (for total pressures <1 x e-4 Torr on inlet)
  • Minimum Detectable Concentration
    <100ppb for all common gases except <10ppm for H2 (trace gas detection limit)
  • Mass Stability
    Better than ±0.1 amu over 8 hours
  • Resolution
    Better than 10% valley between peaks of equal height throughout the mass range
  • Bakeout Temperature and Bakeout Jacket
    Included for 180°C bakeout
  • Ion Source
    High conductance closed ion source
  • Filaments
    Replaceable twin Tungsten or Thoria filaments
  • Mass Filter
    Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
  • Power Requirements
    88-264 VAC, 47/63 Hz, 600 Watts
  • Operating Temperature
    Electronics: 10-40°C
  • Maximum Operating Conditions
    80% RH (non condensing)
  • LED Status Indication
    Interlock status, filament emission, SEM, power and communications
  • I/O Capability
    4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
  • Other Facilities
    Leak check headset socket, external filament trip socket, instrument reset
  • Software
    Process Eye Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
  • Communication
    Ethernet CAT-5e
  • PC Requirements
    Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
  • Simultaneous Multi-Sensor
    Process Eye Professional client/server configuration offers flexible multi-sensor operation
  • Shipping Weight
    44 lbs (20 Kg)
  • Compliance
    CE (control unit)
  • Mounting Flange
    DN35CF (70mm/2.75 inch OD) Conflat® flange
  • Vacuum Hardware
    60 l/s Turbomolecular pump with high conductance analyzer housing, inlet system, right angle valve, automated vacuum controller (RVC) completely inter locked and integrated.
  • Mobile RGA Platform
    Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604 mm)
  • Pneumatics
    60-80 psig CDA
  • Foreline Pump
    Dry diaphragm standard; Other options available
  • Analyzer Housing Base Pressure
    Better than 5e-9 Torr after bakeout
  • Mechanical Support
    Optional stands and brackets are available

Features

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