The Vision 2000-B™ is designed to track levels of potentially damaging residual gases that can negatively impact the quality of product – for example, aluminum deposition can be negatively impacted by the presence of O2 and H2 O, which can lead to poor bulk film characteristics and surface roughness. The Vision 2000-B features the “smart head” technology from the Microvision 2. The electronics unit mounts directly onto the analyzer head, and connects to the system PC via an ethernet interface.
The open ion source analyzer incorporates twin filaments, where the second “back-up” filament enables continued operation in the event of a filament failure. The user serviceable analyzer design allows the ion source to be easily removed and dismantled for cleaning. The standard system includes a double-filter analyzer for increased sensitivity of higher mass species, contamination resistance and enhanced long term stability
Systems can be equipped with a heater jacket and pneumatic isolation valve. A 3-way pneumatic valve for manual control of isolation inlet valve is standard and optional pressure switch assemblies can be chosen to detect within milliseconds when a valve has opened or closed on the tool. This provides Vision 2000-B systems with the flexibility to fully satisfy the application requirements of any vacuum baseline RGA process.
The Vision 2000-B analyzer uses Process Eye Professional, a highly flexible, modular application operating under 32bit or 64bit Windows XP, Vista, Server 2008 or Windows 7. Designed with a “client/server” structure, Process Eye Professional incorporates TCP/IP protocol for full network compatibility.
Process Eye Professional uses recipes to specify the way in which the instrument scans, displays data, and responds to the data acquired. Recipes are user configurable using the “Recipe Wizard” and are ideal for monitoring the various phases of repetitive recipes.
Recipes can be linked together to address different monitoring conditions or to facilitate automatic calibration (using pre-defined calibration recipes). The single button push (or external signal) initiation of a Process Eye Professional recipe eliminates the need for highly skilled, full time operators. The flexibility of Process Eye Professional allows recipes to be configured that will:
In addition, Process Eye Professional provides “live history” for quick on-line review of data trend events. Recently captured bar chart spectra are stored in a data buffer and can be reviewed by moving a cursor over the associated trend plot.