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vision 2000-b vacuum baseline rga for process tools
Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA

Specifications

  • Mass Range
    Standard: 1-100 amu
    Optional: 1-200 amu, 1-300 amu
  • Detector
    Dual (Faraday and secondary electron multiplier)
  • Maximum Analyzer Operating Pressure
    7.6e-5 Torr (1e-4 mbar)
  • Minimum Detectable Concentration
    Faraday: 2e-11 Torr (2.7e-11 mbar)
    Secondary electron multiplier: 5e-14 Torr (6.7e-14 mbar)
  • Mass Stability
    Better than ±0.1 amu over 8 hours at stable ambient temperature
  • Resolution
    Better than 10% valley between peaks of equal height throughout the mass range
  • Ion Source
    Open ion source
  • Filaments
    Replaceable twin Tungsten or Thoria filaments
  • Mass Filter
    Double filter (1 inch RF only pre-filter with 4 inch main filter)
  • Weight
    Control Module: 1.7 kg
  • Power Requirements
    24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
  • Operating Temperature
    Electronics: 10-40°C
  • LED Status Indication
    Interlock status, emission OK, SEM, power and communications
  • I/O Capability
    4 analog inputs (-11 to +11v, 22 bit)
    2 analog outputs (0-10V, 12 bit)
    16 digital TTL I/O
    1 opto-isolated filament control input
    1 dedicated gauge port
  • Other Facilities
    Leak check headset socket, external filament trip and instrument reset
  • Software
    Process Eye® Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
  • Communication
    Ethernet CAT-5e
  • PC Requirements
    Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1024 MB RAM, 120 GB disk free space drive. Multi-sensor installation may require higher specifications.
  • Simultaneous Multi-Sensor
    Multi-Sensor Process Eye Professional client/server configuration offers flexible multi-sensor operation
  • Shipping Weight
    25 lbs (11.4 Kg)
  • Compliance
    CE (control unit)
  • Mounting Flange
    DN35CF (70mm/2.75inch OD) Conflat® flange
  • Vacuum Hardware
    Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
  • Pneumatics
    60-80 psig CDA

Features

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