Metal Etch Process Trap, Disposable Trapping Element, Effluent Management

Technical Specs

  • Type
    Metal Etch Process Trap
  • Body Size
    6 or 8 in.
  • Flange Type
    ISO-KF
  • Flange Size
    NW40 or NW50
  • Configuration
    Inline
  • Seal Material
    Viton®
  • Capacity
    3 lbs. AICl3
  • Exposed Materials
    Stainless Steel, Viton®
  • Pressure Drop
    p=pressure in mTorr, c=1355+5.73p (Viscous Flow Region)
  • Dry Weight
    13 lbs (5.9 kg)
  • Cooling Water Flow Rate
    >6 gal/hr (400 ml/min)
  • Cooling Water Temperature
    < 86° F (30° C)
  • Flow Conductance
    p=pressure in mTorr, c(sscm/mTorr) = 1.4p, slightly higher than 3 inch tube

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