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Flow Ratio Controller, 4-zone, EtherCAT
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Flow Ratio Controller, 4-zone, DeviceNet
DLTNA4 Flow Ratio Controller, 4-zone, DeviceNet

Specifications

  • Full Scale Flow Range
    500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
  • Maximum Operating Outlet Pressure
    200 Torr at maximum flow rate through all channels
  • Maximum Allowable Outlet Pressure Differential
    50 Torr with the same percentage flow through all channels
  • Normal Operating Pressure Differential
    <150 Torr, Except, <450 Torr for 10K/10K
  • Ratio Control Range
    0, 5 to 100% Full Scale
  • Ratio Accuracy
    ± 2% set point (for percent set points above 10%)
  • Ratio Repeatability & Reproducibility
    ±0.3% of set point
  • Resolution
    0.02% of channel Full Scale
  • Zero Temperature Coefficient
    0.05% Full Scale/°C (500 ppm)
  • Span Temperature Coefficient
    <0.08% of Reading/°C (800 ppm)
  • Typical Settling Time
    <3 seconds (typical dependent on downstream conductance matching)
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10-40°C
  • Storage Temperature
    -20-65°C
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Temperature Accuracy
    +2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male, non-rotatable
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of channel Full Scale at 500 Torr differential to <10 Torr
  • Wetted Materials
    316 Stainless Steel VAR, 316 Stainless Steel nickel, Inconel®, KM-45, PTFE
  • Surface Finish
    5 microinch average Ra
  • Connector
    5 pin microconnector
  • Set Point Command Signal
    Digital
  • Communication
    DeviceNet or EtherCAT
  • Compliance
    CE

Features

Control Flow to Four Zones

The DELTA IV, four channel ratio controller provides a needed “knob” to tune process gas flows over the substrate surface or gas dispersion head to help achieve these uniformities. The DELTA IV ratio controller provides closed loop control over the flow proportion that is not available with typical metering valve or flow orifice setups that have often been used. The DELTA ratio controllers provide the added advantage of tuning the process from the tool controller as opposed to manual valve adjustment necessary with metering valve and manual changeout which is impractical with fixed flow orifices.

The DELTA IV flow ratio controller is shown here with its four flow outputs providing flow to center (C) and outer (O) zones within a process chamber for a dual wafer chamber or a dual chamber configuration.
Above, the device starts with flows of 20, 30, 10 and 40% in channels, Q1, Q2, Q3 and Q4 respectively. The flow then transitions to 25% in each channel followed by a transition to 10, 20, 30 and 40% in each channel.

Wide Dynamic Ratio Control Range

The DELTA IV has a wide dynamic ratio control range and fast development of chamber flow while being adaptive to different tool and process conditions. MKS has developed a unique patent pending ratio control logic enabling rapid ratio and flow response times. This control logic enables the total input flow to be split with channel flows ranging from 2 to 100% of the channel Full Scale for measurement and control purposes. The total of all channel flows shall be split in such a way that their sum equals 100%. For example the flows may be split to 10, 20, 30 and 40% of total flow input going to channels Q1, Q2, Q3 and Q4, respectively. The dynamic control also allows for individual channels to be given 0% set points which closes the valve, effectively closing off flow to this output.

In-Situ Embedded Diagnostics

The DELTA’s diagnostic feature allows the user to check the DELTA’s performance in-situ, lowering costs through reduced removal of No Problem Found devices. This feature is enabled through a web browser utility accessed through the device’s Ethernet port. This utility uses a standard web browser and requires no special software. The diagnostic input includes the ability to control the device locally, operate the device, open and close valves along with collecting and saving data for later analysis.

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