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delta iii 3-zone flow ratio controller with ethercat
Flow Ratio Controller, 3-zone, EtherCAT
delta iii 3-zone flow ratio controller with devicenet
Flow Ratio Controller, 3-zone, DeviceNet

Specifications

  • Full Scale Flow Range
    500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
  • Maximum Operating Outlet Pressure
    200 Torr
  • Maximum Allowable Outlet Pressure Differential
    50 Torr
  • Normal Operating Pressure Differential
    <150 Torr; Except, <450 Torr for 10K/10K
  • Ratio Control Range
    0, 5 to 100% Full Scale
  • Ratio Accuracy
    ±2% set point (for percent set points above 10%)
  • Repeatability
    ±0.3% of set point
  • Resolution
    0.02% of channel Full Scale
  • Zero Temperature Coefficient
    <0.05% Full Scale/°C (500 ppm)
  • Span Temperature Coefficient
    <0.08% of Reading/°C (800 ppm)
  • Typical Settling Time
    <3 seconds
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10-40°C
  • Storage Temperature
    -20-65°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Temperature Display
    0-100°C
  • Temperature Accuracy
    2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male, non-rotatable
  • Display
    4 digits for value, 4 characters for unit
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of channel Full Scale at 500 Torr differential to <10 Torr
  • Wetted Materials
    316 Stainless Steel VAR, 316 Stainless Steel nickel, Inconel, KM-45, PTFE
  • Surface Finish
    5 microinch average Ra
  • Set Point Command Signal
    Digital
  • Maximum Inlet Pressure
    150 psig
  • Communication
    DeviceNet or EtherCAT
  • Compliance
    CE

Features

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