Vision 2000-C XD & Vision 2000-E XD High Sensitivity RGAs for Multi-pressure & CVD/ALD

Mass Range 1-300 amu
Ion Source High conductance closed ion source
Filaments Independently replaceable twin Tungsten filaments
Mass Filter Double filter (1-inch "RF only" pre-filter with 4-inch main filter)
Detector System Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure 1e-3 Torr at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure <2e-11 Torr (for total pressures <1e-4 Torr on baseline inlet)
Minimum Detectable Concentration <15ppb specified with Argon or Nitrogen
Mass Stability Better than ±0.1 amu over 8 hours
Resolution Better than 10% valley between peaks of equal height throughout the mass range
Vacuum System Pressure Ranges
Base Pressure Ranges Ion source at maximum pressure at 1 mTorr, 10 mTorr or 100 mTorr
Process Pressure Ranges Ion source at maximum pressure at 10 mTorr, 100 mTorr, 500 mTorr, 1.5 Torr, 5 Torr, 10 Torr, 40 Torr, 100 Torr or 700 Torr (*Optional gas acceleration for ranges <10 Torr available. For other inlet and process pressure ranges, please consult the factory).
Mounting Flange DN35CF (70mm/2.75 inches OD) Conflat® flange. Custom adapters can be provided.
Vacuum Hardware 60 l/s turbomolecular pump with high conductance analyzer housing, inlet system, UniBloc™ inlet, automated vacuum control (RVC) completely interlocked and integrated
Backing Vacuum System Standard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting
Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system
Base Pressure Better than 5e-9 Torr after bakeout
Bakeout Temperature & Bakeout Jacket Included for 180°C bakeout
Operating Temperature 90°C (controlled to ±1°C)
Total Weight 33 lbs. (15 kg) to bolt on Process System
Mechanical Support Optional stands and brackets are available
Mobile RGA Platform Optional RGA trolley to improve versatility (footprint 18x24 inches, 455x604mm)
Pneumatics 60-80 psig CDA
Control Unit/PC
Control Module Weight 1.7 kg
Power 88-264 VAC, 47/63 Hz, 600 Watts
Maximum Ambient Operating Temperature Electronics: 10-40°C, 80% RH (non condensing)
LED Status Indication Interlock status, filament emission, SEM, power and communications
I/O Capability 4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities Leak check headset socket, external filament trip socket, instrument reset
Software Process Eye® Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7* (*recommended)
Communications Ethernet CAT-5e
Minimum PC Specification Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor Process Eye Professional client/server configuration offers flexible multi-sensor operation.
Compliance Compliant to RoHS Directive 2002/95/EC (control unit)
RGA Controller to Vacuum System Cables
Length 33 feet (10 m) standard RGA and 10 feet (3m) with mobile RGA platform.
Other lengths available dependent upon process system and customer requirements
Total Shipping Weight 44 lbs (20 Kg) may vary depending upon backing pump and instrument rack requirements

Specifications are subject to change without notice.
Copyright MKS Instruments, Inc. unless noted otherwise.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.