Specifications

300mm Resist-Torr® Photoresist Detection Monitor RGA

Performance
Mass Range 1-200 amu
Detector System Dual
(Faraday and Secondary Electron Multiplier)
Minimum Detectable Concentration <100ppb for all common gases except <10ppm for H2
Mass Stability Better than ±0.1 amu over 8 hours at stable ambient temperature
Resolution Better than 10% valley between peaks of equal height throughout the mass range
Analyzer & Housing
Ion Source High sensitivity, closed ion source
Filaments Replaceable twin Thoria filaments
Analyzer Housing Base Pressure Better than 5x10-9 Torr after bakeout
Inlet Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum.
Includes heater jacket.
Mass Filter Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
Mounting Flange 2.75 inch Conflat® flange, SS capillary
Bakeout Temperature & Bakeout Jacket Included for 200°C bakeout
Vacuum Hardware 60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
Foreline Pump Dry diaphragm standard
Calibration Hardware Reference gas standard for automated calibration
Control Unit/PC
Control Module Weight 1.7 kg
Power 88-264 VAC, 47/63 Hz, 600 Watts
Maximum Ambient Operating Temperature Electronics: 10-40°C, 80% RH (non condensing)
LED Status Indication Interlock status, filament emission, SEM, power and communications
I/O Capability 4 analog inputs and 2 outputs (plus 1 dedicated gauge input).
Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities Leak check headset socket, external filament trip socket, instrument reset
Software Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft� Windows� xP, Vista, Server 2008 or Windows 7 (recommended)
Communications Ethernet CAT-5e
Minimum PC Specification Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor Process Eye Professional client/server configuration offers flexible multi-sensor operation.
RGA Controller to Vacuum System Cables Length 33 feet (10 m) standard RGA.
Other lengths available dependent upon process system and customer requirements
Compliance Compliant to RoHS Directive 2002/95/EC (control unit)
Facilities
Power 88-264 VAC, 47/63 Hz, 600 Watts
Pneumatics 60-80 psig CDA
Weight at Tool Approximately 24 lbs (11.0 Kg) to bolt-on process system (support stand or bracket required)
Shipping Weight Approximately 85 pounds (38.5 Kg)
varies with configuration

Specifications are subject to change without notice.

Copyright MKS Instruments, Inc. unless noted otherwise.

300mmResist-Torr® and PR Index® are registered trademarks of MKS Instruments, Inc.
Process Eye™ is a trademark of MKS Instruments, Inc.
Pentium® is a registered trademark of the Intel® Corporation.
Microsoft®, Windows®, Windows® NT are registered trademarks of Microsoft Corporation.

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 408-750-0300.