Photoresist Detection Monitor, 300 mm Resist-Torr®

Technical Specs

  • Mass Range
    1 - 200 amu
  • Detector
    Dual (Faraday and Secondary Electron Multiplier)
  • Minimum Detectable Concentration
    <100 ppb for all common gases except <10 ppm for H2
  • Mass Stability
    Better than ±0.1 amu over 8 hours at stable ambient temperature
  • Resolution
    Better than 10% valley for peaks of equal height across mass range
  • Bake Out Temperature
    200°C with Bakeout Jacket
  • Ion Source
    High sensitivity, closed ion source
  • Filaments
    Twin Thoria filaments
  • Mass Filter
    Double filter (1 in. "RF only" pre-filter with 4 in. main filter)
  • Weight
    Approximately 24 lbs (11.0 kg) to bolt-on process system (support stand or bracket required)
  • Power Requirements
    88 - 264 VAC, 47/63 Hz, 600 Watts
  • Maximum Operating Conditions
    Electronics: 10 - 40°C, 80% RH (non condensing)
  • LED Status Indication
    Interlock status, filament emission, SEM, power and communications
  • I/O Capability
    4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
  • Software
    Process Eye Professional fully network compatible control platform generating under 32 bit or 64 bit Microsoft Windows XP, Vista, Server 2008 or Windows 7
  • Communication
    Ethernet CAT-5e
  • Shipping Weight
    Approximately 85 pounds (38.5 kg) varies with configuration
  • Compliance
    CE
  • Mounting Flange
    DN35CF (70 mm/2.75 in. OD) Conflat, SS capillary
  • Vacuum Hardware
    60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
  • Pneumatics
    60-80 psig CDA
  • Foreline Pump
    Dry diaphragm standard
  • Type
    Residual Gas Analyzer
  • Analyzer Housing Base Pressure
    Better than 5x10-9 Torr after bakeout
  • Electronics Weight on Flange
    1.7 kg
  • Inlet
    Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
  • Other Features
    Leak check headset socket, external filament trip socket, instrument reset
  • RGA to Vacuum System Cable Length
    Length 33 ft (10 m) standard RGA. Other lengths available dependent upon process system and customer requirements
  • Measurement Technique
    Mass Spectrometry

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