The 300 mm Resist-Torr® Photoresist Detection Monitor Residual Gas Analyzer is an optimal combination of a closed ion source quadrupole mass analyzer with fast response capillary inlet, and advanced proprietary algorithms developed exclusively for the degas chambers on industry leading 300mm PVD cluster tools. It is often difficult to know when a photoresist problem is affecting the productivity of a 300mm PVD system. Even small amounts of residual resist, when introduced over a prolonged period, can reduce yields, cause particle contamination or slowly contaminate process chambers, thereby requiring premature kit changes. Major photoresist hits can be very costly, upwards of hundreds of thousands of dollars for lost wafers, especially if the tantalum/copper target becomes contaminated.
<100 ppb for all common gases except <10 ppm for H2
Mass Stability
Better than ±0.1 amu over 8 hours at stable ambient temperature
Resolution
Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature
200°C with Bakeout Jacket
Ion Source
High sensitivity, closed ion source
Filaments
Twin Thoria filaments
Mass Filter
Double filter (1 in. "RF only" pre-filter with 4 in. main filter)
Weight
Approximately 24 lbs (11.0 kg) to bolt-on process system (support stand or bracket required)
Power Requirements
88 - 264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
Electronics: 10 - 40°C, 80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Software
Process Eye Professional fully network compatible control platform generating under 32 bit or 64 bit Microsoft Windows XP, Vista, Server 2008 or Windows 7
Communication
Ethernet CAT-5e
Shipping Weight
Approximately 85 pounds (38.5 kg) varies with configuration
Compliance
CE
Mounting Flange
DN35CF (70 mm/2.75 in. OD) Conflat, SS capillary
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
Pneumatics
60-80 psig CDA
Foreline Pump
Dry diaphragm standard
Type
Residual Gas Analyzer
Analyzer Housing Base Pressure
Better than 5x10-9 Torr after bakeout
Electronics Weight on Flange
1.7 kg
Inlet
Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
Length 33 ft (10 m) standard RGA. Other lengths available dependent upon process system and customer requirements
Measurement Technique
Mass Spectrometry
Technical Specs
Mass Range
1 - 200 amu
Detector
Dual (Faraday and Secondary Electron Multiplier)
Minimum Detectable Concentration
<100 ppb for all common gases except <10 ppm for H2
Mass Stability
Better than ±0.1 amu over 8 hours at stable ambient temperature
Resolution
Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature
200°C with Bakeout Jacket
Ion Source
High sensitivity, closed ion source
Filaments
Twin Thoria filaments
Mass Filter
Double filter (1 in. "RF only" pre-filter with 4 in. main filter)
Weight
Approximately 24 lbs (11.0 kg) to bolt-on process system (support stand or bracket required)
Power Requirements
88 - 264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
Electronics: 10 - 40°C, 80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Software
Process Eye Professional fully network compatible control platform generating under 32 bit or 64 bit Microsoft Windows XP, Vista, Server 2008 or Windows 7
Communication
Ethernet CAT-5e
Shipping Weight
Approximately 85 pounds (38.5 kg) varies with configuration
Compliance
CE
Mounting Flange
DN35CF (70 mm/2.75 in. OD) Conflat, SS capillary
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
Pneumatics
60-80 psig CDA
Foreline Pump
Dry diaphragm standard
Type
Residual Gas Analyzer
Analyzer Housing Base Pressure
Better than 5x10-9 Torr after bakeout
Electronics Weight on Flange
1.7 kg
Inlet
Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
Additional CAD file downloads are not available for this product.
300MM-RESIST-TORR - Drawings
Additional drawings are not available for this product.
300MM-RESIST-TORR
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Photoresist Detection Monitor, 300 mm Resist-Torr®