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Photoresist Detection Monitor, 300 mm Resist-Torr®
Model: 300MM-RESIST-TORR
Photoresist Detection Monitor, 300 mm Resist-Torr®
Photoresist Detection Monitor, 300 mm Resist-Torr®
Model: 300MM-RESIST-TORR
Overview
Overview
The 300 mm Resist-Torr® Photoresist Detection Monitor Residual Gas Analyzer is an optimal combination of a closed ion source quadrupole mass analyzer with fast response capillary inlet, and advanced proprietary algorithms developed exclusively for the degas chambers on industry leading 300mm PVD cluster tools. It is often difficult to know when a photoresist problem is affecting the productivity of a 300mm PVD system. Even small amounts of residual resist, when introduced over a prolonged period, can reduce yields, cause particle contamination or slowly contaminate process chambers, thereby requiring premature kit changes. Major photoresist hits can be very costly, upwards of hundreds of thousands of dollars for lost wafers, especially if the tantalum/copper target becomes contaminated.
Technical Specs
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Mass Range1 - 200 amu
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DetectorDual (Faraday and Secondary Electron Multiplier)
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Minimum Detectable Concentration<100 ppb for all common gases except <10 ppm for H2
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Mass StabilityBetter than ±0.1 amu over 8 hours at stable ambient temperature
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ResolutionBetter than 10% valley for peaks of equal height across mass range
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Bake Out Temperature200°C with Bakeout Jacket
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Ion SourceHigh sensitivity, closed ion source
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FilamentsTwin Thoria filaments
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Mass FilterDouble filter (1 in. "RF only" pre-filter with 4 in. main filter)
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WeightApproximately 24 lbs (11.0 kg) to bolt-on process system (support stand or bracket required)
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Power Requirements88 - 264 VAC, 47/63 Hz, 600 Watts
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Maximum Operating ConditionsElectronics: 10 - 40°C, 80% RH (non condensing)
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LED Status IndicationInterlock status, filament emission, SEM, power and communications
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I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
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SoftwareProcess Eye Professional fully network compatible control platform generating under 32 bit or 64 bit Microsoft Windows XP, Vista, Server 2008 or Windows 7
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CommunicationEthernet CAT-5e
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Shipping WeightApproximately 85 pounds (38.5 kg) varies with configuration
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ComplianceCE
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Mounting FlangeDN35CF (70 mm/2.75 in. OD) Conflat, SS capillary
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Vacuum Hardware60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
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Pneumatics60-80 psig CDA
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Foreline PumpDry diaphragm standard
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TypeResidual Gas Analyzer
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Analyzer Housing Base PressureBetter than 5x10-9 Torr after bakeout
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Electronics Weight on Flange1.7 kg
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InletDual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
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Other FeaturesLeak check headset socket, external filament trip socket, instrument reset
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RGA to Vacuum System Cable LengthLength 33 ft (10 m) standard RGA. Other lengths available dependent upon process system and customer requirements
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Measurement TechniqueMass Spectrometry
Resources & Downloads
Photoresist Detection Monitor, 300 mm Resist-Torr®
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