SEMOZON® AX8410 PRIME
Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator

SEMOZON AX8410 PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator - click to enlarge
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The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.

The SEMOZON® AX8410 PRIME converts oxygen to ozone through silent electrical discharge. Its novel patented cell design supports new process requirements requiring higher ozone concentrations at flow rates up to 80 slm. The increased flow rate and higher concentration position the AX8410 PRIME generator to meet the ozone requirements for the next generation of semiconductor processes.

Features & Benefits:

  • Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C supports new process requirements and fast processing speeds
  • O2 flow rate from 5 slm to 80 slm enables process flexibility
  • Patented cell structure design improves gap uniformity to enable production of high concentration ozone
  • High ozone output enables innovative system design opportunities
  • Closed-loop operation for tighter process control
  • New multi-parameter touch screen interface for smart front panel operation and control
  • Expanded data logging capabilities
  • Backwards compatible communication interface with SEMOZON® AX8407
  • Designed for Reliability and Compliance

Configurations:

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Need help?

Contact an Applications Specialist by sending an email to MKS Instruments or call 978-284-4000.