The AX8410 PRIME High Concentration, Ultra High Flow Ozone Generator converts oxygen to ozone through silent electrical discharge at flow rates up to 80 slm. The increased flow rate and higher concentration position the AX8410 PRIME generator to meet the ozone requirements for the next generation of semiconductor processes.
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AX8410 - Drawings
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AX8410
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Ozone Gas Generator, 5 - 80 slm, Ultra Clean, Ultra High Concentration