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Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator

Specifications

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    375g/Nm3
  • Flow Rate
    22.7 lpm (6.0 gpm) per generator
  • Feed Gas
    Oxygen, Nitrogen (100 - 1000 ppm of total flow)
  • Feed Gas Supply Pressure
    O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)
  • Feed Gas Purity
    Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
  • Operating Temperature
    5 - 40°C (41 - 104°F)
  • Cooling Water Temperature Required
    5 - 25°C (41 - 77°F)
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    3 - 0.5 MΩcm DI
  • Cooling Water Minimum Flow Required
    22.7 lpm (6.0 gpm) per generator (configuration dependent)
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    11 kw per generator
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    70.8 l/s (150 cfm) per generator
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
  • Control Air Pressure
    70 - 100 psig (483 - 689 kPa)
  • Control Air Type
    CDA or dry nitrogen, 40µ filtered
  • Control Air Fitting
    0.25 in. compression (Swagelok®)
  • Exhaust Connection
    8 in. diameter duct opening
  • Dimensions
    28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    345 kg (760 lb) for system with one generator
  • Compliance
    CE, UL/CSA, SEMI S2, SEMI F47
  • Altitude
    Up to 1000 m (3280 ft) above mean sea level

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