Overview

The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.

• Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C
• O2 flow rate from 5 slm to 80 slm enables process flexibility
• Patented cell structure design improves gap uniformity to enable production of high concentration ozone
• High ozone output enables innovative system design opportunities
• Closed-loop operation for tighter process control
• Multi-parameter touch screen interface for smart front panel operation and control