SEMOZON® AX8410 PRIME Ultra Clean, Ultra High Concentration, Ultra High Flow Ozone Generator

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semozon ax8410 prime ozone gas generator

Overview

The SEMOZON® AX8410 PRIME is the initial product offering in MKS' next generation platform of compact, high concentration, high flow, ultra clean ozone generators. It features a newly designed cell and power structure to achieve twice the ozone output of earlier models with a similar footprint.

Ozone concentration up to 375 g/Nm3 or 24.2 wt% at 5°C
O2 flow rate from 5 slm to 80 slm enables process flexibility
Patented cell structure design improves gap uniformity to enable production of high concentration ozone
High ozone output enables innovative system design opportunities
Closed-loop operation for tighter process control
Multi-parameter touch screen interface for smart front panel operation and control

Products

		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Pressure	Ozone Output	Flow Rate	Availability	Featured Item	Price		Brand
		AX8410 Ozone Gas Generator, 5 - 80 slm, Ultra Clean, Ultra High Concentration Contact Us	AX8410 Ozone Gas Generator, 5 - 80 slm, Ultra Clean, Ultra High Concentration	UNIVERSAL	0.0	1.0	0.0		0.0	Ozone Gas Generator	20 - 50 psig	up to 335 g/Nm³	5 - 80 slm	Contact Us

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Specifications

Type

Ozone Gas Generator
Ozone Output

up to 335 g/Nm³
Flow Rate

5 - 80 slm
Feed Gas

Oxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
Nominal Cell Pressure (Delivery)

15 - 45 psig (100 - 310 kPa)
Pressure

20 - 50 psig
Control Interface

Front panel control and remote operation
Cooling Water Temperature

5 - 25°C (41 - 77°F)
Cooling Water Filtration

100 microns

Cooling Water Quality

Resistivity ≥50 KΩ/cm
Minimum Water Flow

22.7 lpm (6.0 gpm)
Voltage Requirements

208 VAC (±10%)
Phase

3Ø & Ground, no Neutral
Current Requirements

50 Amps
Frequency

50/60 Hz
Weight

77 kg (170 lb)
Dimensions

483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
Compliance

CE, UL/CSA, and SEMI F47

Specifications

Type

Ozone Gas Generator
Ozone Output

up to 335 g/Nm³
Flow Rate

5 - 80 slm
Feed Gas

Oxygen: Grade 6 or better O2, Nitrogen: 100 - 1000 ppm Grade 5 or better N2
Nominal Cell Pressure (Delivery)

15 - 45 psig (100 - 310 kPa)
Pressure

20 - 50 psig
Control Interface

Front panel control and remote operation
Cooling Water Temperature

5 - 25°C (41 - 77°F)
Cooling Water Filtration

100 microns

Cooling Water Quality

Resistivity ≥50 KΩ/cm
Minimum Water Flow

22.7 lpm (6.0 gpm)
Voltage Requirements

208 VAC (±10%)
Phase

3Ø & Ground, no Neutral
Current Requirements

50 Amps
Frequency

50/60 Hz
Weight

77 kg (170 lb)
Dimensions

483 x 521 x 267 mm (19.0 x 20.5 x 10.5 in) (width x depth x height)
Compliance

CE, UL/CSA, and SEMI F47