Configuration Options

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Description
P9B-MFM Mass Flow Meter, with Pressure Transducer, 5 sccm to 50 slm

Specifications

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    5-50000 sccm
  • Measurement Range
    0.1-100% of Full Scale (range on mech.)
  • Maximum Inlet Pressure
    500 psig
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of set point for 20-100% Full Scale
    ±0.2% of Full Scale for 2-20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale./°C
  • Span Temperature Coefficient
    <0.08% of Reading./°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    <30 min (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • Storage Temperature
    -20° to 80°C (-4° to 149° F)
  • Temperature Display
    0-100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Pressure Display
    0-100 psia
  • Pressure Readout Units
    psia, kPA
  • Pressure Accuracy
    1% Full Scale
  • Pressure Resolution
    0.1 psia
  • Fitting Type
    Compatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
  • External Leak Integrity
    <1 x 10-10
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
  • Surface Finish
    10μ inch average Ra
  • Weight
    <2.5 lbs (1.1kg)
  • Compliance
    CE
  • Power Requirements
    +15 to +24 VDC @ 200mA max
  • Analog I/O Connector
    15-pin Type “D” Male, 9 pin Type “D” Male
  • Flow Input Output Signal
    0-5 VDC
  • DeviceNet Connector
    5 pin microconnnector (DeviceNet)
  • RS485 Connector
    9 pin Type D male
  • Attitude Insensitivity
    0.25% of Full Scale for indicated zero, span and actual span

Features

Multi-gas/Multi-range Capable

The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.

Communications Options

Digital I/O DeviceNet™ EtherCAT®
Input Power Required +11 to +25 VDC per DeviceNet specification (@ <2.0 watts) +24 VDC (<5 watts)
Connector 5 pin microconnnector (DeviceNet) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) No switch
Data Rate/Network Length Data rate (user selectable)
125 Kbps, 500 meters (1,640 feet)
250 Kbps, 250 meters (820 feet)
500 Kbps, 100 meters (328 feet)		 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers
7,0 to 9,9 are software ID numbers
(6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3)		 3 switches, 16 positions
Network Size Up to 64 nodes Up to 4095 nodes
Network Topology Linear (trunkline/dropline) power and signal on same network cable n/a
Visual Indicators LED network status (green/red)
LED module status (green/red)
Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)
Compliance CE CE

Resources

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