Sample Mass Flow Controller Gas Codes

Name Symbol Code
1,3,5,7-Octatetraene C8H10 345
1,7-Octadiyne C8H10 343
2,2 Dichloro1,1,1 Trifluoroethane C2HCl2F3 186
2,6-Octadiyne C8H10 344
3-one-2,5-dimethyl Hexadiene C8H10 342
4-Methyl, 1-Pentene C6H12 178
Acetaldehyde Methoxy C3H6O2 331
Acetic Acid C2H4O2 283
Acetone C3H6O 184
Acetone,hydroxy C3H6O2 332
Acetonitrile C2H3N 173
Acetylene C2H2 042
Acrylic Acid C3H4O2 289
Acrylonitrile C3H3N 276
Air Air 008
Allene C3H4 066
Aluminum Trifluoride AlF3 226
Ammonia NH3 029
Argon Ar 004
Arsenic Pentafluoride AsF5 096
Arsenic Tribromide AsBr3 242
Arsenic Trichloride AsCl3 216
Arsenic Trifluoride AsF3 195
Arsenic Triiodine AsI3 196
Arsine AsH3 035
Benzene C6H6 197
Borazine B3N3H6 198
Boron Tribromide BBr3 079
Boron Trichloride BCl3 070
Boron Trifluoride BF3 048
Bromine Br2 021
Bromine Pentafluoride BrF5 116
Bromine Trifluoride BrF3 076
Bromochlorodifluoromethane CBrClF2 199
Bromotrifluoroethylene C2BrF3 105
Bromotrifluoromethane CBrF3 080
Butadiene C4H6 100
Butane C4H10 117
Butanol-1 C4H10O 271
Butanol-2 C4H10O 336
Butene C4H8 104
Carbon Dioxide CO2 025
Carbon Disulfide CS2 040
Carbon Monoxide CO 009
Carbon Tetrabromide CBr4 200
Carbon Tetrachloride CCl4 101
Carbon Tetrafluoride CF4 063
Carbonyl Fluoride CF2O 046
Carbonyl Sulfide COS 034
Chlorine Cl2 019
Chlorine Dioxide ClO2 201
Chlorine Pentafluoride ClF5 202
Chlorine Trifluoride ClF3 077
Chlorobenzene C6H5Cl 172
Chlorodifluoroethane C2H3ClF2 203
Chlorodifluoroethylene C2HClF2 204
Chlorodifluoromethane CHClF2 057
Chloroform CHCl3 071
Chloropentafluoroethane C2ClF5 119
Chlorosilane SiH3Cl 205
Chlorotrifluoroethylene C2ClF3 206
Chlorotrifluoromethane CClF3 074
Cisbutene C4H8 107
Cyanogen C2N2 059
Cyanogen Chloride ClCN 037
Cyclobutane C4H8 207
Cyclopropane C3H6 061
Deuterium D2 014
Deuteriumsilane SiD4 244
Diazomethane CH2N2 208
Diborane B2H6 058
Dibromodifluoromethane CBr2F2 209
Dibromotetrafluorethane C2Br2F4 130
Dichlorodifluoromethane CCl2F2 084
Dichlorodimethylsilane C2H6SiCl2 212
Dichloroethylene C2H2Cl2 210
Dichloroethylene -cis C2H2Cl2 211
Dichloroethylene -trans C2H2Cl2 191
Dichlorofluoromethane CHCl2F 065
Dichloromethane CH2Cl2 265
Dichlorosilane SiH2Cl2 067
Dichlorotetrafluoroethane C2Cl2F4 125
Diethoxy Dimethyl Silane C6H16O2Si 188
Diethyl Ether C4H10O 338
Diethyl Sulfide C4H10S 298
Diethylamine C4H11N 213
Diethylsilane C4H12Si 154
Diethylzinc C4H10Zn 214
Difluoroamidogen NF2 232
Difluorochloroethane C2H3ClF2 103
Difluoroethane C2H4F2 082
Difluoroethylene C2H2F2 064
Difluoromethane CH2F2 160
Difluorosilane SiH2F2 134
Digermane Ge2H6 217
Dimethoxydimethyl Silane C4H12O2Si 300
Dimethyl Ether C2H6O 073
Dimethyl Selenide C2H6Se 284
Dimethylaluminum-hydride C2H7Al 164
Dimethylamine C2H7N 085
Dimethylcadmium C2H6Cd 218
Dimethylethylaminealane C4H14NAl 166
Dimethylpropane C5H12 122
Dimethylsilane C2H8Si 219
Dimethyltellurium C2H6Te 220
Dimethylzinc C2H6Zn 135
Diphenylmethan-4,4'-diisocyanat C15H10N2O 281
Diphenylmethylenediamine C13H14N2 280
Disilane Si2H6 097
Disilane Hexafluoride SiF6 326
Ethane C2H6 054
Ethanol C2H6O 136
Ethoxy Silane C2H8OSi 285
Ethyl Acetylene C4H6 093
Ethyl Chloride C2H5Cl 075
Ethyl Fluoride C2H5F 221
Ethyl Formate C3H6O2 291
Ethylbenzene C8H10 174
Ethylene C2H4 038
Ethylene Dichloride C2H4Cl2 222
Ethylene Oxide C2H4O 045
Ethyleneglycol C2H6O2 169
Fluorine F2 018
Fluoro Silane SiH3F 327
Fluoroacetylene C2HF 223
Fluoroform CHF3 049
Fluorotriethoxysilane C6H15OSiF 224
Formaldehyde CH2O 322
Germane GeH4 043
Germanium Tetrachloride GeCl4 113
Germanium Tetrafluoride GeF4 099
Glycidol C3H6O2 335
Glycol Methylene Ether C3H6O2 333
Hafnium Tetranitrate HfN4O12 275
Halothane C2HBrClF3 137
Helium He 001
Heptafluoropropane C3HF7 295
Hexafluoro Acetylacetone C5H2F6O2 272
Hexafluoro butadiene-1,3 C4F6 297
Hexafluoro Propane C3H2F6 267
Hexafluoro-2-Butyne C4F6 270
Hexafluoroacetone C3F6O 225
Hexafluorobenzene C6F6 192
Hexafluorocyclobutene C4F6 296
Hexafluoroethane C2F6 118
Hexafluoropropylene C3F6 138
Hexafluoropropylene Oxide C3F6O 286
Hexamethyldisilane C6H18Si2 139
Hexamethyldisilazane C6H19Si2N 227
Hexamethyldisiloxane C6H18Si2O 228
Hexane C6H14 127
Hexanediol-1,6 C6H14O2 170
Hydrazine N2H4 050
Hydrazoic Acid HN3 269
Hydrogen H2 007
Hydrogen Bromide HBr 010
Hydrogen Chloride HCl 011
Hydrogen Cyanide HCN 024
Hydrogen Fluoride HF 012
Hydrogen Iodide HI 017
Hydrogen Selenide H2Se 023
Hydrogen Sulfide H2S 022
Hydrogen Telluride H2Te 229
Iodine Pentafluoride IF5 115
Iodomethane CH3I 323
Iron Carbonyl C5O5Fe 230
Isobutane C4H10 111
Isobutene C4H8 106
Isobutyl Alcohol C4H10O 341
Isopentane C5H12 231
Isopropal Alcohol C3H8O 187
Name Symbol Code
Krypton Kr 005
Mercury Hg 329
Methane CH4 028
Methanol CH4O 176
Methyl Acetate C3H6O2 292
Methyl Acetylene C3H4 068
Methyl Bromide CH3Br 044
Methyl Chloride CH3Cl 036
Methyl Fluoride CH3F 033
Methyl Isopropyl Ether C4H10O 340
Methyl Mercaptan CH4S 047
Methyl Methacrylate Polymer C5H8O2 305
Methyl Propyl Ether C4H10O 339
Methyl Vinyl Ether C3H6O 081
Methylamine CH5N 052
Methylbutene C5H10 120
Methylcyclohexane C7H14 177
Methylene Bromide CH2Br2 268
Methylsilane CH6Si 185
Methyltrichlorosilane CH3Cl3Si 183
Molybdenum Hexafluoride MoF6 124
Monoethylamine C2H7N 233
Monomethyl Hydrazine CH6N2 234
Neon Ne 002
Nickel Carbonyl C4O4Ni 140
Nitric Acid HNO3 167
Nitric Oxide NO 016
Nitrogen N2 013
Nitrogen Dioxide NO2 026
Nitrogen Tetroxide N2O4 095
Nitrogen Trifluoride NF3 053
Nitrogen Trioxide N2O3 078
Nitromethane CH3NO2 235
Nitrosyl Chloride NOCl 141
Nitrous Oxide N2O 027
Octafluorobutane C4F8 236
Octafluorocyclobutane C4F8 129
Octafluorocyclopentene C5F8 266
Octane C8H18 237
Oxygen O2 015
Oxygen Dichloride OCl2 238
Oxygen Difluoride OF2 041
o-Xylene C8H10 179
Ozone O3 030
Pentaborane B5H9 142
Pentaborane(11) B5H11 239
Pentafluoroethane C2HF5 155
Pentafluoropropanol C3H3F5O 288
Pentane C5H12 240
Perchloryl Fluoride ClO3F 072
Perfluorobutane C4F10 241
Perfluoropropane C3F8 128
Phenol C6H6O 180
Phosgene CCl2O 060
Phosphine PH3 031
Phosphorous Oxychloride POCl3 102
Phosphorus Pentafluoride PF5 143
Phosphorus Trichloride PCL3 193
Phosphorus Trifluoride PF3 062
Propane C3H8 089
Propanoic acid C3H6O2 334
Propenamine C3H7N 293
Propylene C3H6 069
Pyridine C5H5N 304
Radon Rn 003
Rhenium Hexafloride ReF6 243
Selenium Hexafluoride SeF6 325
Silane SiH4 039
Silicon Tetrabromide Br4Si 278
Silicon Tetrachloride SiCl4 108
Silicon Tetrafluoride SiF4 088
Stibine SbH3 245
Styrene C8H8 319
Sulfur Dioxide SO2 032
Sulfur Hexafluoride SF6 110
Sulfur Monochloride S2Cl2 189
Sulfur Tetrafluoride SF4 086
Sulfur Trioxide SO3 246
Sulfuric Acid H2SO4 171
Sulfuryl Fluoride SO2F2 087
Tantalum (V) Ethoxide C10H25O5Ta 279
TEAsat C6H15O4As 274
Tellurium Hexafluoride TeF6 247
Tertiary Butyl Alcohol C4H10O 337
Tertiarybutylarsine C4H11As 161
Tertiarybutylphosphine C4H11P 162
Tetrachlorodiborane B2Cl4 248
Tetrachloroethylene C2Cl4 168
Tetraethoxysilane C8H20O4Si 144
Tetraethyl Lead C8H20Pb 316
Tetraethyl silane C8H20Si 317
Tetraethylgermane C8H20Ge 315
Tetrafluorethylene C2F4 094
Tetrafluorodiborane B2F4 249
Tetrafluoroethane C2H2F4 156
Tetrafluorohydrazine N2F4 157
Tetrahydrofuran C4H8O 182
Tetrakis( diethylamino ) Titanium C16H40N4Ti 282
Tetrakis( Dimethylamino ) Titanium C8H24N4Ti 318
Tetramethoxy Silane C4H12O4Si 301
Tetramethoxygermanium C4H12GeO4 299
Tetramethyl Lead C4H12Pb 302
Tetramethyl Tin C4H12Sn 252
Tetramethylcyclotetra-siloxane C4H16Si4O4 158
Tetramethylgermanium C4H12Ge 250
Tetramethylsilane C4H12Si 251
Tetrasilane Si4H10 253
Tin Tetrachloride SnCl4 145
Titanium Tetrachloride TiCl4 114
Titanium Tetraiodide TiI4 254
Titaniun Tetraisopropoxide C12H28OTi 194
Toluene C7H8 181
Transbutene C4H8 098
Triallylamine C9H15N 320
Tribromomethane CHBr3 083
Tribromostibine SbBr3 255
Tributylaluminum C12H27Al 146
Trichloroethane C2H3Cl3 112
Trichlorofluoromethane CCl3F 091
Trichlorosilane SiHCl3 147
Trichlorostibine SbCl3 256
Trichlorotrifluoroethane C2Cl3F3 126
Triethoxy silane C6H16O3Si 312
Triethoxyborane C6H15BO3 308
Triethoxyphosphine C6H15O3 311
Triethyl arsine C6H15As 306
Triethyl silane C6H16Si 313
Triethylaluminum C6H15Al 257
Triethylamine C6H15N 310
Triethylantimony C6H15Sb 258
Triethylborate C6H15O3B 163
Triethylgallium C6H15Ga 148
Triethylindium C6H15In 309
Trietoxy arsine C6H15AsO3 307
Trifluoroacetic Acid CF3CO2H 259
Trifluoroacetonitrile C2F3N 260
Trifluoromethylhypofluorite CF4O 321
Trifluoropropane C3H5F3 290
Trifluorosilane SiHF3 261
Triisobutylaluminum C12H27Al 262
Trimethoxy Silane C3H10O3Si 287
Trimethoxyborine C3H9BO3 131
Trimethyl Ester Phosphoric Acid C3H9O4P 294
Trimethyl Silane C3H10Si 190
Trimethylaluminum C3H9Al 149
Trimethylamine C3H9N 109
Trimethylaminealane C3H12AlN 165
Trimethylantimony C3H9Sb 150
Trimethylarsenic C3H9As 151
Trimethylborane C3H9B 277
Trimethylgallium C3H9Ga 152
Trimethylindium C3H9In 153
Trimethylisoxazole C6H9NO 314
Trimethylphosphite C3H9PO3 133
Trimethylphosphorous C3H9P 132
Trimethylvinylsilane C5H12Si 303
Trisilane Si3H8 328
Tritium T2 159
Tungsten Hexacarbonyl C6O6W 273
Tungsten Hexafluoride WF6 121
Uranium Hexafluoride UF6 123
Vinyl Bromide C2H3Br 056
Vinyl Chloride C2H3Cl 055
Vinyl Fluoride C2H3F 051
Water Vapor H2O 020
Xenon Xe 006
Xenon Difluoride XeF2 324
Xylene m- C8H10 263
Xylene p- C8H10 264
Zinc Zn 330