P9B 50,000 sccm Mass Flow Controllers are available with the following options.
|P9B Mass Flow Controller||P9B|
|Gas (Per Semi Standard E52-0703)|
|Sulfur Hexafluoride (SF6)||110|
|Other Gas Options||See Here|
|Flow Range Full Scale|
|Fittings (compatible with)|
|4 VCR Male||R|
|C-seal (1.125 in.)||C|
|W-seal (1.125 in.)||H|
|W-seal (1.5 in.)||F|
|RS485 (9 pin connector)||5|
|9 pin D connector||A|
|15 pin D connector||B|
|Normally Closed, Teflon® (10 sccm - 50 slm)||T|
|Normally Open, Teflon® (10 sccm - 50 slm)||P|
|Mass Flow Meter||0|
|Shipped with up to date firmware revision||30|
The performance capabilities of the P9B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6. The P9B is a true multi-range/multi-gas MFC that enables the user to have confidence in this device’s capability and minimize MFC inventory requirements.
Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating.
P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.