P4B High Performance Mass Flow Meter, 5-50000 sccm
Overview
The P4B is a 1.125 inch body, multi-gas/multi-range, metal sealed, Mass Flow Meter (MFM). The P4B meter incorporates the latest in digital flow meter electronics along with a well proven, patented thermal sensor and mechanical design. The digital electronics utilize the latest MKS algorithms providing multi-gas/multi-range measurement capability. Included is a digital calibration that yields 1% of Reading accuracy on the calibration gas.
- Tightly controlled flow accuracy of process gas for improved chamber process matching
- Embedded configuration and diagnostics software that allows the user to check MFM functionality without device removal from the tool
Products
Configuration Options
The following options are available for P4B High Performance Mass Flow Meters
Ordering Code Example: P4B013502C60030
|
Configuration Option |
Option Code |
|---|---|
| P4B Mass Flow Meter | P4B |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| Swagelok 4 VCR | R |
| C-seal (1.125 in.) | C |
| W-seal (1.125 in.) | H |
Connector |
|
| DeviceNet | 6 |
| 15 pin D (Analog I/O) | B |
| 9 pin D (Analog I/O) | A |
Valve/Device Type |
|
| No Valve (MFM) | 0 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 30 |
Specifications
-
TypeMass Flow Meter
-
Full Scale Flow Range5-50000 sccm
-
Measurement Range0.1-100% of Full Scale (range on mech.)
-
Maximum Inlet Pressure500 psig
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale -
Repeatability±0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale./°C
-
Span Temperature Coefficient<0.08% of Reading./°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
-
Operating Temperature10-50°C
-
Storage Humidity0-95% relative humidity, non-condensing
-
Storage Temperature-20° to 80°C (-4° to 149° F)
-
Temperature Display0-100°C
-
Temperature Accuracy±2°C
-
Temperature Resolution0.1°C
-
Display4 digits for value, 4 characters for unit
-
Fitting TypeCompatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
-
External Leak Integrity<1 x 10-10
-
Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
-
Surface Finish10μ inch average Ra
-
Weight<2.5 lbs (1.1kg)
-
ComplianceCE
-
Power Requirements+15 to +24 VDC @ 200mA max
-
Analog I/O Connector15-pin Type “D” Male, 9 pin Type “D” Male
-
Flow Input Output Signal0 to 5 VDC
-
DeviceNet Connector5 pin microconnnector (DeviceNet)
-
RS485 Connector9 pin Type “D” Male
Features
Communications Options
| Digital I/O | DeviceNet™ | RS485 |
|---|---|---|
| Input Power Required | +11 to +25 VDC per DeviceNet specification (@ <2.0 watts) | +15 to +24 VDC @ 200mA max |
| Connector | 5 pin microconnnector (DeviceNet) | 9 pin Type "D" Male |
| Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) | 3 positions: 9.6, 19.2, 38.4K (Default) |
| Data Rate/Network Length | Data rate (user selectable) 125 Kbps, 500 meters (1,640 feet) 250 Kbps, 250 meters (820 feet) 500 Kbps, 100 meters (328 feet) |
Data rate (user selectable) 9.6 Kbps, 1200 meters (4,000 feet) 19.2 Kbps, 1200 meters (4,000 feet) 38.4 Kbps, 1200 meters (4,000 feet) |
| MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6.3) |
2 switches, 10 positions; 0,0 to 9,9. Available MAC ID's are 3,2 to 9,9. |
| Network Size | Up to 64 nodes | Up to 32 nodes |
| Network Topology | Linear (trunkline/dropline) power and signal on same network cable | Master/slave |
| Visual Indicators | LED network status (green/red) LED module status (green/red) Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31) |
LED network status (green/red) LED module status (green/red) Scrolling LED displays (MFC Type, Flow Full Scale, Gas Type, IP address, Instance Number (1 to 31) |
| Compliance | CE | CE |
Multi-gas/Multi-range Capable
The multi-gas/multi-range capability, along with tight performance specifications for accuracy, allow users to minimize inventory of high flow MFM part numbers. The multi-gas/multi-range feature (along with other custom controls) is accessed through the MFM embedded diagnostic interface, that requires no special software or hardware to operate. A standard Ethernet cable and JAVA-enabled HTML browser, widely available, are all the tools needed. The critical gas parameters for typical high flow rate gases are already stored on the device. Configuring the device is simply a matter of selecting the gas from a drop down menu and specifying the desired full scale flow range. The diagnostic interface also allows the user to perform routine device health checks, plot flow, and store operating data for off-line analysis.
Ultra-High Velocity