High Performance Multi-gas, Multi-range 5 to 50,000 sccm Mass Flow Controllers

Overview
Products
Configuration Options
Features
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p4b high performance 5-50,000 sccm mass flow controller

Overview

The P4B is the next generation of multi-gas/multi-range mass flow controllers designed to meet critical gas flow control requirements for accuracy and speed of response while minimizing mass flow controller inventory requirements. P4B MFC multi-gas/multi-range capabilities are enabled with gas parameters already stored in memory which provide 1% of set point accuracy for the user selected gas and is capable of Full Scale ranges from 5 sccm to 50 slm.

Flow rates from 5 to 50,000 sccm
Multi-gas/multi-range with 1% of set point accuracy
Analog I/O: 0 to 5 VDC
Digital I/O: DeviceNet, RS485
MFM option

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Products

Configuration Options

		Description
		P4B Mass Flow Controller, Multi-gas, Multi-range, 5 sccm to 50 slm

Show Configuration Options

P4B 50,000 sccm Mass Flow Controllers are available with the following options.

Configuration Option	Option Code
P4B Mass Flow Controller	P4B
Gas (Per Semi Standard E52-0703)
Nitrogen (N₂)	013
Ammonia (NH₃)	029
Sulfur Hexafluoride (SF₆)	110
Other Gas Options	See Here
Flow Range Full Scale
5 sccm	500
10 sccm	101
20 sccm	201
50 sccm	501
100 sccm	102
200 sccm	202
500 sccm	502
1000 sccm	103
2000 sccm	203
5000 sccm	503
10000 sccm	104
20000 sccm	204
30000 sccm	304
50000 sccm	504
Fittings (compatible with)
4 VCR Male	R
C-seal (1.125 in.)	C
W-seal (1.125 in.)	H
Connector
DeviceNet	6
RS485 (9 pin connector)	5
9 pin D connector	A
15 pin D connector	B
Valve Type
Normally Closed, Teflon® (10 sccm - 50 slm)	T
Normally Open, Teflon® (10 sccm - 50 slm)	P
Mass Flow Meter	0
Reserved
Standard	0
Firmware
Shipped with up to date firmware revision	30

Specifications

Full Scale Flow Range

5 - 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

5 to 5000 sccm (10 to 40 psid)
10000 to 20000 sccm (15 to 40 psid)
30000 to 50000 sccm (25 to 40 psid)
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

< 0.05% of Full Scale/°C
Span Temperature Coefficient

< 0.08% of Reading/°C
Inlet Pressure Coefficient

< 0.02% of Reading/psi
Typical Settling Time

< 750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature

10° to 50°C
Storage Humidity

0 to 95% Relative Humidity, non-condensing

Storage Temperature

-20° to 80°C
Temperature Display

0 to 100°C
Temperature Accuracy

±2°C
Temperature Resolution

0.1°C
Display

4 digits for value, 4 characters for unit
External Leak Integrity

< 1 x 10 (scc/sec He)
Leak Integrity Through Closed Valve

< 1.0% of Full Scale at 25 psig inlet to atmosphere
Wetted Materials

316L stainless steel VAR,316 stainless steel, Elgiloy, KM-45
Valve Seat Material

PTFE (Teflon)
Surface Finish

10µ inch average Ra
Weight

3 lbs (1.4 kg)
Compliance

CE
Power Requirements

+15 to +24 VDC @ 350mA max
Analog I/O Connector

15-pin Type "D" Male, 9 pin Type "D" Male
Flow Input Output Signal

0 to 5 VDC

Specifications

Full Scale Flow Range

5 - 50,000 sccm (N2 equivalent)
Maximum Inlet Pressure

150 psig
Normal Operating Pressure Differential

5 to 5000 sccm (10 to 40 psid)
10000 to 20000 sccm (15 to 40 psid)
30000 to 50000 sccm (25 to 40 psid)
Proof Pressure

1000 psig
Burst Pressure

1500 psig
Control Range

2% to 100% of Full Scale
Typical Accuracy

±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability

±0.3% of Reading
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

< 0.05% of Full Scale/°C
Span Temperature Coefficient

< 0.08% of Reading/°C
Inlet Pressure Coefficient

< 0.02% of Reading/psi
Typical Settling Time

< 750 msec., typical above 5% Full Scale
Warm-up Time

30 minutes
Operating Temperature

10° to 50°C
Storage Humidity

0 to 95% Relative Humidity, non-condensing

Storage Temperature

-20° to 80°C
Temperature Display

0 to 100°C
Temperature Accuracy

±2°C
Temperature Resolution

0.1°C
Display

4 digits for value, 4 characters for unit
External Leak Integrity

< 1 x 10 (scc/sec He)
Leak Integrity Through Closed Valve

< 1.0% of Full Scale at 25 psig inlet to atmosphere
Wetted Materials

316L stainless steel VAR,316 stainless steel, Elgiloy, KM-45
Valve Seat Material

PTFE (Teflon)
Surface Finish

10µ inch average Ra
Weight

3 lbs (1.4 kg)
Compliance

CE
Power Requirements

+15 to +24 VDC @ 350mA max
Analog I/O Connector

15-pin Type "D" Male, 9 pin Type "D" Male
Flow Input Output Signal

0 to 5 VDC

Features

Short Process Steps Performance

The performance capabilities of the P4B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of set point. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6.

Multi-Gas / Multi-Range Capability

Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating.

P Series Mass Flow Controller Overview

P-Series high performance MFCs feature full digital control architecture for fast response to setpoint over the operable device range. The embedded web browser application allows changes in gas type and full scale flow, which reduces overall costs by minimizing the number and variety of MFCs that must be kept in inventory.